FTIR Ellipsometry Study on RF sputtered Permalloy-Oxide Thin Films

Abstract

The optical properties of RF sputtered polycrystalline permalloy oxide (PyO) thin films were studied in the infrared by variable angle ellipsometry. The dispersion of PyO shows a Lorentzian dispersion peak at 381.5 cm-1. We attribute this peak to the transverse optical phonon of PyO. This peak is consistent with a rocksalt crystal structure for the Ni0.81Fe0.19O1-δ thin films.

Symmetry considerations on band filling and first optical transition in NiO

“…With the sputtering vapor deposition technique, oxygen levels can be finely tuned to achieve near-stoichiometric or oxygen-poor AFM Ni 1−x Fe x O y thin films. Reports of dual ion beam sputtered Ni 1−x Fe x O (x = 0.19) and radio frequency magnetron sputtered Ni 1−x Fe x O confirm the rock salt crystal structure via X-ray diffraction for films sputtered at low oxygen pressure [34][35][36]. At lower concentrations, Wensheng et al have found, via X-ray diffraction, a rocksalt phase for pulsed laser deposition grown Ni 1−x Fe x O (x = 0.02), as well [37].…”