Friction-induced instability and vibration in a precision motion stage with a friction isolator

Abstract

Motion stages are widely used for precision positioning in manufacturing and metrology applications. However, nonlinear pre-motion friction can significantly affect their control performance and accuracy. This paper analytically studies the dynamical effect of a friction isolator (FI) proposed in previous studies, in which the beneficial effects of FI on improving the robustness, speed, and precision of the system have been experimentally demonstrated. A fundamental understanding of the dynamical effects of FI is achieved by applying linear analysis on a motion stage with and without FI under the effect of LuGre friction dynamics. The systems are studied with the implementation of PID controllers, which, in terms of practicability in motion control, provide more general observations than when only PD is implemented. Parametric analysis is carried out on the effect of control gains, FI design parameters, and LuGre friction parameters to thoroughly observe the eigenvalue and stability characteristics. Numerical simulation is then established to validate the analytical results and demonstrate the interesting dynamical phenomena with the involvement of LuGre friction, PID control, and the friction isolator in the motion stage system. Based on the results, fundamental analytical conclusions about the FI are reached, which also pave the road for future nonlinear studies.