Frequency-tunable CMOS-MEMS slot antenna

Abstract

This paper presented a frequency-reconfigurable slot antenna fabricated in 0.18-μm CMOS process with a chip size of 1.2×1.2 mm 2 . By utilizing the multi-state actuators, the frequency of this antenna can be switched to 43, 47, 50.5, 54, 57.5 GHz with return loss better than 20 dB. The measured antenna patterns agree well with the simulation results.I.

Design of multi-state actuator for mm-wave reconfigurable front-end circuits using CMOS-MEMS technologies

“…In our previous work [6][7][8], four different reconfigurable front-end circuits using CMOS-MEMS technology been successfully designed and demonstrated in V-/W-band, revealing that CMOS-MEMS could be a promising solution for mm-wave applications. Within [6][7][8], the electrostatic laminated actuator driven by parallel beams has been proposed to change the interdigitated capacitance values, leading to the circuit reconfigurability. However, the tuning capability shown in [6][7] is still limited.…”