Frequency-temperature compensation of piezoelectric resonators by electric DC bias field

Chen, Qingming; Zhang, Tao; Wang, Qing-Ming

doi:10.1109/tuffc.2005.1561617

Cited by 21 publications

(9 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The active compensation method is described from the perspective of signal processing and involves the following points: Fabricating temperature-sensitive circuitry to generate temperature-dependent electrical signals, which are used by high-precision logic devices or ASIC to compensate for the output signals from the resonator, thus reducing the temperature drift of the sensor [ 10 , 11 ]; Establishing the mapping relationship between the physical parameters, i.e., pressure and sensor signals, as well as the temperature information, which is known as multiple regression analysis in statistics [ 12 , 13 ]. …”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Comparison and Verification of Three Algorithms for Accuracy Improvement of Quartz Resonant Pressure Sensors

Yao,

Xu,

Jing

et al. 2023

Micromachines

View full text Add to dashboard Cite

Pressure measurement is of great importance due to its wide range of applications in many fields. AT-cut quartz, with its exceptional precision and durability, stands out as an excellent pressure transducer due to its superior accuracy and stable performance over time. However, its intrinsic temperature dependence significantly hinders its potential application in varying temperature environments. Herein, three different learning algorithms (i.e., multivariate polynomial regression, multilayer perceptron networks, and support vector regression) are elaborated in detail and applied to establish the prediction models for compensating the temperature effect of the resonant pressure sensor, respectively. The AC-cut quartz, which is sensitive to temperature variations, is paired with the AT-cut quartz, providing the essential temperature information. The output frequencies derived from the AT-cut and AC-cut quartzes are selected as input data for these learning algorithms. Through experimental validation, all three methods are effective, and a remarkable improvement in accuracy can be achieved. Among the three methods, the MPR model has exceptionally high accuracy in predicting pressure. The calculated residual error over the temperature range of −10–40 °C is less than 0.008% of 40 MPa full scale (FS). An intelligent automatic compensation and real-time processing system for the resonant pressure sensor is developed as well, which may contribute to improving the efficiency in online calibration and large-scale industrialization. This paper paves a promising way for the temperature compensation of resonant pressure sensors.

show abstract

Section: Introductionmentioning

confidence: 99%

“…Fabricating temperature-sensitive circuitry to generate temperature-dependent electrical signals, which are used by high-precision logic devices or ASIC to compensate for the output signals from the resonator, thus reducing the temperature drift of the sensor [ 10 , 11 ];…”

Section: Introductionmentioning

confidence: 99%

Comparison and Verification of Three Algorithms for Accuracy Improvement of Quartz Resonant Pressure Sensors

Yao,

Xu,

Jing

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

“…Deposition techniques such as metal-oxide chemical vapor deposition (MOCVD) [3] and chemical solution deposition (CSD) [4] are current research topics. Furthermore, there are CMOS-compatible deposition techniques, since these processes have low fabrication temperatures, such as sputtering-based techniques, which can obtain high levels of crystallinity [5,6], being an ideal fabrication process to apply the nonlinear phenomena of piezoelectric materials in a new scope of applications [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

“…There are applications that use the nonlinear properties with the same targets as the linear applications exposed above such as actuators [21,22], energy harvesters [23], sensors [24], memories [25], and tunable devices [7,26,27]. In all of these works, the physical and electrical behavior of the system is explained through mathematical models [10,[28][29][30][31] or first-principles deductions (a specific thermodynamic formulation) [32][33][34][35], where the models are only valid for a specific geometry disposition or layer stack, while the physical formulations are general, but very difficult to solve analytically. The case of the hysteresis nonlinear effect is a special topic since its behavior has remnant fields after time; its formulation in deformation-charge form and micro-mechanical modeling was exposed in [36,37] respectively.…”

Section: Introductionmentioning

confidence: 99%

Stress–Charge Nonlinear Physical Description and Tensor Symmetries for Piezoelectric Materials

et al. 2023

View full text Add to dashboard Cite

Nonlinear piezoelectric materials are raised as a great replacement for devices that require low power consumption, high sensitivity, and accurate transduction, fitting with the demanding requirements of new technologies such as the Fifth-Generation of telecommunications (5G), the Internet of Things (IoT), and modern radio frequency (RF) applications. In this work, the state equations that correctly predict the nonlinear piezoelectric phenomena observed experimentally are presented. Furthermore, we developed a fast methodology to implement the state equations in the main FEM simulation software, allowing an easy design and characterization of this type of device, as the symmetry structures for high-order tensors are shown and explained. The operation regime of each high-order tensor is discussed and connected with the main nonlinear phenomena reported in the literature. Finally, to demonstrate our theoretical deductions, we used the experimental measurements, which presented the nonlinear effects, which were reproduced through simulations, obtaining maximum percent errors for the effective elasticity constants, relative effective permittivity, and resonance frequencies of 0.79%, 2.9%, and 0.3%, respectively, giving a proof of the potential of the nonlinear state equations presented for the unifying of all nonlinear phenomena observed in the piezoelectric devices.

show abstract

“…Actually, the non linear behavior of piezoelectric materials can be described by several formulations and mathematics tools like strain-charge formulations [23,24], models for a specific experimental setup [25,26] and deformation theories [27,28]. From these modeling tools, the thermodynamic formulations and deformation theories are the most useful, since both allow to predict the behavior of nonlinear phenomena through the simulation and analytic calculus.…”

Section: Introductionmentioning

confidence: 99%

State equations and tensors symmetry of non-linear piezoelectric materials

Jaramillo-Alvarado¹,

Torres‐Jácome²,

Wade³

et al. 2022

Eng. Res. Express

View full text Add to dashboard Cite

The linear behavior of piezoelectric materials is well known from a century ago, but also, the non-linear behavior for these material have found a novel way of applications. Currently, the new technologies as the fifth generation of telecommunications (5G) and Internet of Things (IoT) are demanding high requirements for the performance of the devices operating under these technologies e.g. high quality factor, high thermal efficiency and device fabrication compatibility with the standard fabrication processes for integrated circuits as CMOS, FD-SOI and FinFET. In this work, the non-linear state equations for piezoelectric effect in stress- charge formulation, the transformations laws and the high order tensors structures are presented, in order to allow an easy way to implement it on FEM simulation software. The non-linear behavior of piezoelectric materials is discussed, and taking into account the analysis done in this work, three ways to implement nonlinear effects to design tunable piezoelectric devices for 5G and IoT applications are presented.

show abstract

Frequency-temperature compensation of piezoelectric resonators by electric DC bias field

Cited by 21 publications

References 20 publications

Comparison and Verification of Three Algorithms for Accuracy Improvement of Quartz Resonant Pressure Sensors

Comparison and Verification of Three Algorithms for Accuracy Improvement of Quartz Resonant Pressure Sensors

Stress–Charge Nonlinear Physical Description and Tensor Symmetries for Piezoelectric Materials

State equations and tensors symmetry of non-linear piezoelectric materials

Contact Info

Product

Resources

About