2015
DOI: 10.1007/s10043-015-0140-3
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Frequency scanning interferometry with nanometer precision using a vertical-cavity surface-emitting laser diode under scanning speed control

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Cited by 7 publications
(2 citation statements)
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“…Within a range of 1.5 m, the distance resolution reached up to 31 μm. In 2015, Kakuma et al [ 16 ] stabilized the sweep speed of the light source using a circuit controller based on a phase-locked loop technology. They marked the frequency using a rubidium gas cell (Rb-cell) and achieved a sub-micrometer measurement accuracy within a 14 mm measurement range, with a measurement standard deviation of 0.12 μm.…”
Section: Introductionmentioning
confidence: 99%
“…Within a range of 1.5 m, the distance resolution reached up to 31 μm. In 2015, Kakuma et al [ 16 ] stabilized the sweep speed of the light source using a circuit controller based on a phase-locked loop technology. They marked the frequency using a rubidium gas cell (Rb-cell) and achieved a sub-micrometer measurement accuracy within a 14 mm measurement range, with a measurement standard deviation of 0.12 μm.…”
Section: Introductionmentioning
confidence: 99%
“…The current-induced frequency modulation noise was reduced two orders of magnitude. Kakuma [18] marked the sweeping frequency of the laser with the special absorption frequency of the Rb cell. The gradient of interference fringes was accurately determined by the linear least square fitting method.…”
Section: Introductionmentioning
confidence: 99%