2010
DOI: 10.1063/1.3367738
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Frequency-resolved temperature imaging of integrated circuits with full field heterodyne interferometry

Abstract: We report a fast imaging method based on full field heterodyne interferometry for the purpose of frequency resolved temperature imaging. An integrated circuit is supplied with a modulated current resulting into a temperature modulation. The frequency content for this modulation is detected using an object beam and a reference beam, frequency-shifted to create a beating of the interference pattern. We obtain frequency domain spectra of the temperature with excellent precision.

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Cited by 11 publications
(8 citation statements)
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“…To cover all such needs, off-chip single-shot imaging of nonelectrical observables (e.g., temperature or strain) is very promising [17], [18], [19], [20], as non-invasive testability of all internal nodes is assured while the RF-IC is under regular operation [21]. Thanks to the use combined of an RF block frequency-modulated driving and a mixer-like approach, electrical information is down converted from a higher to a lower frequency observable measured by following lock-in procedures (heterodyne technique) [20], [22], [23].…”
Section: Introductionmentioning
confidence: 99%
“…To cover all such needs, off-chip single-shot imaging of nonelectrical observables (e.g., temperature or strain) is very promising [17], [18], [19], [20], as non-invasive testability of all internal nodes is assured while the RF-IC is under regular operation [21]. Thanks to the use combined of an RF block frequency-modulated driving and a mixer-like approach, electrical information is down converted from a higher to a lower frequency observable measured by following lock-in procedures (heterodyne technique) [20], [22], [23].…”
Section: Introductionmentioning
confidence: 99%
“…Semi‐invasive thermographic methods are based on the use of thermosensitive coatings consisting of an indicator liquid crystal or fluorescent inorganic based compounds . Alternatively, the direct imaging of high temperature changes is possible by thermoreflectance microscopy, which is based on measuring the relative change of optical reflectivity with temperature, allowing for high resolution noncontact thermal imaging down to the microscale . Alternative methods on the basis of microresonators are envisioned for the imaging at room temperature .…”
mentioning
confidence: 99%
“…to perform Doppler imaging in various domains such as microfluidics [10], vibration motion characterization [90,93,94], in vivo blood flow assessment [7,9,78] and frequencyresolved temperature response of integrated circuits [84], among others. DHH has also been used for photothermal studies, where a heating laser modulated at a constant frequency offset creates a modulation of the local refractive index of the sample [4].…”
Section: Heterodyne Filtering Of Static Objectsmentioning
confidence: 99%