1998
DOI: 10.1063/1.367946
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Frequency-resolved microwave reflection photoconductance

Abstract: The effect of the carrier recombination process in silicon on the microwave reflection coefficient is analyzed in the frequency domain. The process is described using a two level recombination/trapping model. Carrier recombination kinetics are characterized by four parameters, two of which are related to the recombination and the other to the trapping processes. These parameters are evaluated for Czochralski silicon wafers based on Nyquist plots. In the evaluation procedure, a nonlinear simplex method is used … Show more

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Cited by 4 publications
(5 citation statements)
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References 12 publications
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“…1 In addition to the PTR and PCR techniques, several other methods based on pulsed or modulated photoexcitation have been developed to determine simultaneously the carrier lifetime and surface recombination velocity, notably (pulsed or modulated) free-carrier absorption (FCA) [14][15][16][17][18][19] and microwave photoconductance decay (-PCD). [20][21][22][23] In the modulated FCA or -PCD technique, the simultaneous determination of the carrier lifetime and surface recombination velocity is implemented using only the phase data, 23,24 therefore the sensitivity of the measurement and the number of parameters to be determined are limited. The sensitivity would be improved by engaging both amplitude and phase data in the multi-parameter fitting procedure, as is done in PTR or PCR measurements.…”
Section: Introductionmentioning
confidence: 99%
“…1 In addition to the PTR and PCR techniques, several other methods based on pulsed or modulated photoexcitation have been developed to determine simultaneously the carrier lifetime and surface recombination velocity, notably (pulsed or modulated) free-carrier absorption (FCA) [14][15][16][17][18][19] and microwave photoconductance decay (-PCD). [20][21][22][23] In the modulated FCA or -PCD technique, the simultaneous determination of the carrier lifetime and surface recombination velocity is implemented using only the phase data, 23,24 therefore the sensitivity of the measurement and the number of parameters to be determined are limited. The sensitivity would be improved by engaging both amplitude and phase data in the multi-parameter fitting procedure, as is done in PTR or PCR measurements.…”
Section: Introductionmentioning
confidence: 99%
“…In this work, we assume (i) non-steady state condition at recombination center (R n ≠ R p ) and (ii) low excess carrier concentration. The second assumption allows linear equations to be used (2) by introduce the following relations 5,16 :…”
Section: Theory and Evaluation Proceduresmentioning
confidence: 99%
“…, can be described by a single Lorentzian 16,21 , peaked at the frequency f 0 , and having a maximum value, Y 0 . The Lorentzian function is plotted for four temperatures (24, 80, 180 and 240°C) in Fig.…”
Section: Theory and Evaluation Proceduresmentioning
confidence: 99%
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