2013
DOI: 10.3390/s130202206
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Frequency Noise Properties of Lasers for Interferometry in Nanometrology

Abstract: In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of fluctuations in displacement in the Michelson interferometer. Several laser sources, including traditional He-Ne and solid-state lasers, and their noise properties are evaluated and compared. The contribution of the laser frequency noise to the displacement measure… Show more

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Cited by 25 publications
(12 citation statements)
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References 48 publications
(41 reference statements)
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“…The concept presented here offers fast response to any change of the optical length in the refractometer beam path, as fast as the response of the interferometer output in case of calculated compensation [5] or as fast as it is offered by the control loop of a stabilized laser in a regime of stabilization of wavelength [6]. The spectral interpretation of the length noise associated with the fluctuating refractive index shows similar characteristics with the laser induced noise [7,8]. As expected the dominating bandwidth here lies in the low-frequency part, where the fluctuations gradually grow into drifts, thermal and pressure induced.…”
Section: Fluctuations Of the Refractive Index Of Airmentioning
confidence: 56%
“…The concept presented here offers fast response to any change of the optical length in the refractometer beam path, as fast as the response of the interferometer output in case of calculated compensation [5] or as fast as it is offered by the control loop of a stabilized laser in a regime of stabilization of wavelength [6]. The spectral interpretation of the length noise associated with the fluctuating refractive index shows similar characteristics with the laser induced noise [7,8]. As expected the dominating bandwidth here lies in the low-frequency part, where the fluctuations gradually grow into drifts, thermal and pressure induced.…”
Section: Fluctuations Of the Refractive Index Of Airmentioning
confidence: 56%
“…These lasers stabilized by saturation spectroscopy can achieve long-term frequency stability better than 1*10 -14 for an integration time of 100 s, which means a more than two orders better result in comparison to traditionally used He-Ne-I 2 stabilized standards [6][7][8][9][10][11][12][13][14][15][16]. The short-term frequency noise of these lasers is also lower [17][18][19][20]. Further improvement in the short-term stability can be reached by means of prestabilization to a high-finesse passive optical cavity or by fiber based interferometer [21,22].…”
Section: Introductionmentioning
confidence: 91%
“…Fig. 7 shows that the resolution is limited by a constant voltage noise above 2 Hz, and by a 1/f current noise below 2 Hz coming from the laser optical power noise [30].…”
Section: Noise Budgetingmentioning
confidence: 99%
“…stage (two translations and two rotations) to adjust the position and the angle of the beams on the photodiodes. The length of the two arms (d 1 and d 2 ) are similar to minimize the impact of the laser frequency noise on the measurements [30]. Note that the He-Ne laser can be replaced by a pigtailed laser diode with a polarization-maintaining optical fiber [8] and a fiber collimator.…”
Section: Interferometric Sensormentioning
confidence: 99%