Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Abstract

Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the excitation dynamics in low-pressure capacitively coupled plasmas (CCPs) in argon-oxygen mixtures. The system used for this study is a geometrically symmetric CCP reactor operated in a fixed mixture gas composition, at fixed pressure and voltage amplitude, with a wide range of driving RF frequencies (2 MHz ≤ f ≤ 15 MHz). The measured and calculated spatio-temporal distributions of the electron impact excitation rates from the Ar ground state to the Ar 2p1 state (with a wavelength of 750.4 nm) show good qualitative agreement. The distributions show significant frequency dependence, which is generally considered to be predictive of transitions in the dominant discharge operating mode. Three frequency ranges can be distinguished, showing distinctly different excitation characteristics: (i) in the low frequency range (f ≤ 3 MHz), excitation is strong at the sheaths and weak in the bulk region; (ii) at intermediate frequencies (3.5 MHz ≤ f ≤ 5 MHz), the excitation rate in the bulk region is enhanced and shows striation formation; (iii) above 6 MHz, excitation in the bulk gradually decreases with increasing frequency. Boltzmann term analysis was performed to quantify the frequency dependent contributions of the Ohmic and ambipolar terms to the electron power absorption.