Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor

Shoaib, Muhammad; Hisham, Nor; Basheer, Noohul; Tariq, Mohammad

doi:10.1007/s10470-016-0695-3

Cited by 15 publications

(5 citation statements)

References 20 publications

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“…Although a sizeable nonlinear behaviour usually accompanies instability, the benefit of sensitivity and quality overwhelms the disadvantage. Electrostatically actuated MEMS resonators have been designed to detect forces [31], masses [32], and accelerations [30,33]. The issue of stabilizing the response in the nonlinear regime has been widely studied.…”

Section: Introductionmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

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A new multi-sensing scheme via nonlinear weakly coupled resonators is introduced in this paper, which can simultaneously detect two different physical stimuli by monitoring the dynamic response around the first two lowest modes. The system consists of a mechanically coupled bridge resonator and cantilever resonator. The eigenvalue problem is solved to identify the right geometry for the resonators to optimize their resonance frequencies based on mode localization in order to provide outstanding sensitivity. A nonlinear equivalent model is developed using the Euler–Bernoulli beam theory while accounting for the geometric and electrostatic nonlinearities. The sensor's dynamics are explored using a reduced-order model based on two-mode Galerkin discretization, which reveals the richness of the response. To demonstrate the proposed sensing scheme, the dynamic response of the weakly coupled resonator is investigated by tuning the stiffness and mass of the bridge and cantilever resonators, respectively. With its simple and scalable design, the proposed system shows great potential for intelligent multi-sensing detection in many applications.

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Section: Introductionmentioning

confidence: 99%

A multi-sensing scheme based on nonlinear coupled micromachined resonators

et al. 2023

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“…At present, there are many effective methods for the dynamic measurement and evaluation of piezoelectric ceramic drive systems. In analyzing the dynamic characteristics of dynamic measurement systems, Shoaib et al [1] established an analytical model for resonance frequency shift in undamped media using dynamic equations and investigated linear and nonlinear behaviors. The current evaluation of measurement results mainly focuses on the measurement error.…”

Section: Introductionmentioning

confidence: 99%

Dynamic modeling and performance evaluation of piezoelectric impact drive system based on neural network

Chen,

Xia,

Song

et al. 2023

Meas. Sci. Technol.

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In metrology and industrial design, the evaluation of measurement uncertainty and error is crucial to the measurement process. The Guide to the Expression of Uncertainty in Measurement and its supplementary documents have established a unified framework and standard for evaluating measurement uncertainty. However, a reasonable method for evaluating dynamic measurement uncertainty has not yet been proposed. By analyzing the dynamic measurement system, and using the long short-term memory time neural network to model the nonlinear dynamics represented by a piezoelectric drive platform, this paper evaluates the system’s dynamic measurement uncertainty through deep integration methods. Bayesian theory is used to propagate probability densities, and experimental results demonstrate the effectiveness of this method for assessing dynamic measurement uncertainty.

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“…Microbeams have been widely employed in micro-electromechanical systems (MEMS) [1][2][3] . There have been many applications of microbeams, such as microscale sensors [4][5][6] , microscale actuators [7][8] , and microswitch [9] .…”

Section: Introductionmentioning

confidence: 99%

Analytic solution for size-dependent behaviors of micro-beam under forced vibration

Wang¹,

Wang²,

Wang³

et al. 2020

Mech. Eng. Sci.

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This paper focuses on the size-dependently mechanical behaviors of a micro-beam under forced vibration. Governing equations of a micro-beam under forced vibration are established by using the modified couple stress theory, Bernoulli-Euler beam theory and D’Alembert’s principle together. A simply supported micro-beam under forced vibration is solved according to the established governing equations and the method of separation of variables. The dimensionless deflection, amplitude mode and period mode are defined to investigate the size-dependently mechanical behaviors of a micro-beam under forced vibration. Results show that the performance of a micro-beams under forced vibration is distinctly size-dependent when the ratio of micro-beam height to material length-scale parameter is small enough. Both frequency ratio and loading location are the important factors that determine the size-dependent performance of a micro-beams under forced vibration.

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Frequency and displacement analysis of electrostatic cantilever-based MEMS sensor

Cited by 15 publications

References 20 publications

A multi-sensing scheme based on nonlinear coupled micromachined resonators

A multi-sensing scheme based on nonlinear coupled micromachined resonators

Dynamic modeling and performance evaluation of piezoelectric impact drive system based on neural network

Analytic solution for size-dependent behaviors of micro-beam under forced vibration

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