2011
DOI: 10.1063/1.3551725
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Freestanding piezoelectric rings for high efficiency energy harvesting at low frequency

Abstract: Energy harvesting at low frequency is a challenge for microelectromechanical systems. In this work we present a piezoelectric vibration energy harvester based on freestanding molybdenum (Mo) and aluminum nitride (AlN) ring-microelectromechanical-system (RMEMS) resonators. The freestanding ring layout has high energy efficiency due to the additional torsional modes which are absent in planar cantilevers systems. The realized RMEMS prototypes show very low resonance frequencies without adding proof masses, provi… Show more

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Cited by 37 publications
(25 citation statements)
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“…In the past several years, some innovative harvester designs have been proposed including an interesting ring design reported by Massaro et al in 2011 ( Figure 5). 24 The socalled ring-MEMS (RMEMS) structure was fabricated by etching away a substrate layer underneath a strip of aluminum nitride (AlN) thin film. The large residual stress within the layered structure caused the AlN strip to roll up, forming the RMEMS structure.…”
Section: Other Configurationsmentioning
confidence: 99%
“…In the past several years, some innovative harvester designs have been proposed including an interesting ring design reported by Massaro et al in 2011 ( Figure 5). 24 The socalled ring-MEMS (RMEMS) structure was fabricated by etching away a substrate layer underneath a strip of aluminum nitride (AlN) thin film. The large residual stress within the layered structure caused the AlN strip to roll up, forming the RMEMS structure.…”
Section: Other Configurationsmentioning
confidence: 99%
“…[12][13][14][15][16][17] The ambient vibration (e.g. vibration of civil engineering structure and heavy machinery) is always stochastic, intermittent, and mainly distributes in the low frequency (<100Hz), 18,19 which usually appear as broad peaks rather than sharp ones when reflected in the spectrum. While most of the cantilever's natural frequencies lie in a narrow frequency range.…”
Section: Introductionmentioning
confidence: 99%
“…The AlN thin film could be grown on a substrate consisting of a thin SiO 2 sacrificial layer and growth by a radio frequency (RF) sputtering technique. A complete energy-harvesting experimental setup based on vibrational forces should consider a controlled shaker and by a lock-in-amplifier (Massaro et al 2011) and a matched load at the output of the energy harvesting device. In addition, the maximum displacement of the piezoelectric cantilever due to an applied voltage could be measured by an image postprocessing method using a camera coupled to a microscope.…”
Section: Characterization Of Small Piezoelectric Devicesmentioning
confidence: 99%
“…Thus, the tuning of the material properties can be performed by controlling the filler generation. With respect to the optical properties, gold (Au) nanoparticles generated by a chemical reduction in PDMS (by means of a HAuCl 4 gold precursor) facilitate light coupling between a tapered optical fiber and a PDMS-Au NM deposited on the core surface (Massaro et al 2011). …”
Section: Introduction To Nanocomposite Materialsmentioning
confidence: 99%