Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Tuomikoski, Santeri; Franssila, Sami

doi:10.1016/j.sna.2005.01.012

Cited by 108 publications

(96 citation statements)

References 22 publications

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“…SU-8 is simple to pattern by photolithography, 17 can readily be bonded to itself, 18 and offers a reasonable combination of mechanical strength and chemical tolerance. For example, the mechanical properties of SU-8 have been exploited to make check valves.…”

Section: B Exploration Of Alternative Polymeric Materialsmentioning

confidence: 99%

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

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This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. I. WHY USE SILICON AND GLASS IN MICRO-AND NANO-FLUIDIC APPLICATIONS?Micro-and nano-fluidic technology continues to be embraced by biologists, 1-3 chemists, 4 and engineers throughout academia and industry. As its applications have expanded, there has been an explosion in the range of materials and processes used to fabricate these devices. The earliest microfluidic devices (e.g., gas 5 and liquid 6 chromatography devices) were made from silicon and glass and borrowed processes directly from semiconductor and microelectromechanical systems (MEMS) manufacturing. 7 Now, however, many researchers have moved away from silicon and glass, and instead use cast elastomers such as polydimethylsiloxane (PDMS)-which is ideal for swift prototyping-or thermoplastic polymers, which can be hot-embossed or injection-molded and are well suited to inexpensive manufacturing. Yet, there remain many applications where glass and silicon offer advantages over polymeric materials. In this paper, we highlight these advantages and offer a framework for selecting fabrication processes when using silicon and glass. A. The dominance of soft lithographyOver the last decade, PDMS has become virtually the default material for forming microfluidic devices, 8 because of the sheer ease with which it can be cast on to a micro-scale mould and then strongly bonded to glass. 9 The elastomeric nature of the material has been exploited to integrate fluidic valves and pumps on-chip and has simplified the production of multi-layer devices because the soft layers readily conform to each other. 10,11 Yet, the low stiffness (usually <1 MPa) of PDMS relative to amorphous thermoplastics, silicon, and glass has its own a) Authors to whom correspondence should be addressed. Electronic addresses: ciliescu@ibn.a-star.edu.sg and hkt@ntu.edu.sg. 6, 016505 (2012) drawbacks. High aspect-ratio channels are notoriously difficult to fabricate in PDMS because of their propensity to collapse. 12 Moreover, difficulties in automating the handling of such a soft material have hampered efforts to scale up PDMS device manufacturing. Meanwhile, PDMS's high oxygen and water permeabilities have proved both a blessing and a curse in different applications.The hydrophobic nature of PDMS can be an important consideration for some biological applications. In drug screening applications, for example, hydrophobic drugs as well as metabolites (urea or albumin) can be absorbed into the device's material due to hydrophobic--hydrophobic interaction...

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Section: B Exploration Of Alternative Polymeric Materialsmentioning

confidence: 99%

A practical guide for the fabrication of microfluidic devices using glass and silicon

Iliescu¹,

Taylor²,

Avram³

et al. 2012

Biomicrofluidics

Self Cite

302

207

View full text Add to dashboard Cite

show abstract

“…The amount of liquid SU8-100 for bonding is determined by minimizing void formation and at the same time reducing the overflow of the material during bonding. A good bonding temperature is 65 0 C which is just above the glass transition temperature (64 0 C) of the SU8 material but not high enough to cause significant overflow as the viscosity changes rapidly around the glass temperature (Tuomikoski and Franssila, 2005). …”

Section: Antenna Assemblymentioning

confidence: 99%

Micromachined High Gain Wideband Antennas for Wireless Communications

Pavuluri¹,

Wang²,

Sangster³

2010

Mobile and Wireless Communications Network Layer and Circuit Level Design

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“…Thicknesses of SU-8 range from sub-micrometer to hundreds of micrometers. SU-8 is easily bondable to itself [4], making it easy to fabricate devices that are completely made of SU-8, which is important for applications where surface charge or adsorptions are important. SU-8 is a negative resist which is exposed with wavelength of 365 nm typically in 1× mask aligner.…”

Section: Introductionmentioning

confidence: 99%

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

et al. 2014

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This work presents patterning of thick (10-50 µm) hybrid polymer structures of ORMOCER ® by laser direct writing. ORMOCER ® combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for many bio-microfluidic applications. ORMOCER ® is liquid before exposure, so patterning is done by contact-free lithography, such as proximity exposure. With laser direct writing, we obtained higher resolution patterns, with smaller radius of curvature (~2-4 µm), compared to proximity exposure (~10-20 µm). Process parameters were studied to find the optimal dose for different exposure conditions and ORMOCER ® layer thicknesses. Two fluidic devices were successfully fabricated: a directional wetting device (fluidic diode) and an electrophoresis chip. The fluidic diode chip operation depends on the sharp corner geometry and water contact angle, and both have been successfully tailored to obtain diodicity. Electrophoresis chips were used to separate of two fluorescent dyes, rhodamine 123 and fluorescein. The electrophoresis chip also made use of ORMOCER ® to ORMOCER ® bonding.

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Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Cited by 108 publications

References 22 publications

A practical guide for the fabrication of microfluidic devices using glass and silicon

A practical guide for the fabrication of microfluidic devices using glass and silicon

Micromachined High Gain Wideband Antennas for Wireless Communications

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

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