1999
DOI: 10.1016/s0040-6090(98)01490-4
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Free-carrier plasma resonance effects and electron transport in reactively sputtered degenerate ZnO:Al films

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Cited by 99 publications
(46 citation statements)
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“…From figure 1,for all examples, two main peaks,corresponding to the (002)and(103)reflections are observed.The (002)diffraction peaks are observed at a 2θvalue of34.23°、34.29、34.28° 、34.26° respectively , which agree with the value reported in the literature for films grown on silicon ,glass and sapphire substrates [ 1,2 ].The c-axis length of the polycrystal tends to increase for all films,as the (002)peak angle was smaller than that of the bulk crystal(34.45°). Furthermore for all examples additionally to the (002) peak the (103)orientation is evident.The similar results are also reported by other authors [3,4].The XRD measurements firstly reveal that these ZAO thin films are polycrystalline and retain the hexagonal wurtzite structure,having lattice parameters corresponding to that of bulk ZnO.Secondly,the XRD patterns suggest that the optimal films with improved crystallinity can be obtained at the O 2 /Ar flow ration range from 2:38 to 4.2:35.8 .Particularly the (103) peak decreases evidently and the(002)peak does not change significantly,which means that at the lower oxygen content the O 2 /Ar flow ration does not mainly influence the degree of crystallinity but the preferred orientation.…”
Section: Structure and Morphological Analysissupporting
confidence: 87%
“…From figure 1,for all examples, two main peaks,corresponding to the (002)and(103)reflections are observed.The (002)diffraction peaks are observed at a 2θvalue of34.23°、34.29、34.28° 、34.26° respectively , which agree with the value reported in the literature for films grown on silicon ,glass and sapphire substrates [ 1,2 ].The c-axis length of the polycrystal tends to increase for all films,as the (002)peak angle was smaller than that of the bulk crystal(34.45°). Furthermore for all examples additionally to the (002) peak the (103)orientation is evident.The similar results are also reported by other authors [3,4].The XRD measurements firstly reveal that these ZAO thin films are polycrystalline and retain the hexagonal wurtzite structure,having lattice parameters corresponding to that of bulk ZnO.Secondly,the XRD patterns suggest that the optimal films with improved crystallinity can be obtained at the O 2 /Ar flow ration range from 2:38 to 4.2:35.8 .Particularly the (103) peak decreases evidently and the(002)peak does not change significantly,which means that at the lower oxygen content the O 2 /Ar flow ration does not mainly influence the degree of crystallinity but the preferred orientation.…”
Section: Structure and Morphological Analysissupporting
confidence: 87%
“…Furthermore, our results are also greater than the calculated phonon-scattering-limited value of ∼400 cm 2 /V·s (27). The optical mobility data obtained with the present method should be a good measure of intrinsic scattering processes because of the effective exclusion of grainboundary/impurity scattering (28).…”
Section: Significancementioning
confidence: 48%
“…This trend is consistent with published findings that the electron affinity of AZO films becomes deeper as the oxygen content is increased during deposition. 4 We confirmed with SEM that the CQD film was discontinuous (Figure 2), thus ensuring that the only lateral conduction path was via the channel. We further confirmed this by spin-coating CQDs under identical conditions onto prepatterned substrates, without the AZO present.…”
mentioning
confidence: 53%