2003
DOI: 10.1117/12.461156
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Frame store PN-CCD detector for the ROSITA mission

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Cited by 7 publications
(4 citation statements)
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“…Residual fraction of Al substrate with a thickness of 100 nm or more is almost impervious to UV light and cannot be used as translucence APA molds if more than 100 nm of residual Al remains between the mold and the support layer. 42 Fig. 2(b) and (c) show the surface and cross-sectional SEM images of the resulting translucent APA mold.…”
Section: Resultsmentioning
confidence: 99%
“…Residual fraction of Al substrate with a thickness of 100 nm or more is almost impervious to UV light and cannot be used as translucence APA molds if more than 100 nm of residual Al remains between the mold and the support layer. 42 Fig. 2(b) and (c) show the surface and cross-sectional SEM images of the resulting translucent APA mold.…”
Section: Resultsmentioning
confidence: 99%
“…The quantum efficiency for X-rays is in the whole energy band from 0.3 keV to 12 keV at least 90 % for the 500 P thick PN-CCD 10 . In the domain of visible light and near infrared a similar high quantum efficiency is obtained (see Figure 3).…”
Section: Key Parametersmentioning
confidence: 99%
“…For the PN-CCD this can be realized on chip by a deposition of a thin and homogeneous aluminum layer (e.g. 50 nm or 100 nm) on the photon entrance window 10 . The experience to accomplish such thin layers with homogeneous thickness is gained from the fabrication of silicon drift detectors (SDD) in our laboratory.…”
Section: Key Parametersmentioning
confidence: 99%
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