Frame generation methodology in mask tape-out flow and automation application

Abstract

Mask tape-out is a frequent job in wafer fabrication factories and research institutes. Frame generation is one of the important steps in mask tape-out flow. It requires extensive lithography, process integration, and mask tape-out experience; a large amount of manual work and various data preparation is included, especially when multiple products are combined into a single mask and all product conditions need to be fulfilled simultaneously. When more factors need to be considered, mistakes can be made. We develop a methodology to help frame generation, such as alignment and overlay mark design, selection and placement. It has demonstrated the ability to guide people in error-proofing work, support for frame GDS automatic generation and metrology recipe automatic generation. This is a user-friendly methodology that can reduce the frame generation difficulty and generation time from several weeks to a few minutes.