Fracture-resistant thin-film metallic glass: Ultra-high plasticity at room temperature

Yu, Chia-Chi; Lee, C. M.; Chu, Jinn P.; Greene, J. E.; Liaw, Peter K.

doi:10.1063/1.4966932

Cited by 22 publications

(7 citation statements)

References 46 publications

(47 reference statements)

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“…As shown inFig. 4(c), the TFMG coating was able to withstand the considerable shear strain, showing indications of interdiffusion with BMGs at the TFMG/BMG interface along the shear step, as previously reported[34].…”

supporting

confidence: 85%

Influence of thin-film metallic glass coating on fatigue behavior of bulk metallic glass: Experiments and finite element modeling

Chu

Jia

et al. 2017

Materials Science and Engineering: A

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A coating of the Zr-based thin-film metallic glass (TFMG) was deposited on the Zr 50 Cu 30 Al 10 Ni 10 bulk metallic glass (BMG) to investigate shear-band evolution under fourpoint-bend fatigue testing. The fatigue endurance-limit of the TFMG-coated samples is ~ 33% higher than that of the BMG. The results of finite-element modeling (FEM) revealed a delay in the shear-band nucleation and propagation in TFMG-coated samples under applied cyclicloading. The FEM study of spherical indentation showed that the redistribution of stress by the TFMG coating prevents localized shear-banding in the BMG substrate. The enhanced fatigue characteristics of the BMG substrates can be attributed to the TFMG coatings retarding shear-band initiation at defects on the surface of the BMG.

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supporting

confidence: 85%

Influence of thin-film metallic glass coating on fatigue behavior of bulk metallic glass: Experiments and finite element modeling

Chu

Jia

et al. 2017

Materials Science and Engineering: A

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“…In less drastic conditions, when crystal growth is limited but nucleation occurs, nanocrystalline films can be obtained. A wide range of unusual properties arise from such configurations, like ultra-high plasticity [26], antibacterial activity [27,28], and high corrosion and wear resistance [29][30][31]. Yet, in most cases, single-phased coatings are considered and the mechanisms at the origin of multi-phased coatings and their potentialities remain essentially unexplored.…”

Section: Introductionmentioning

confidence: 99%

Composition-driven transition from amorphous to crystalline films enables bottom-up design of functional surfaces

Borroto

García-Wong

Bruyère

et al. 2021

Applied Surface Science

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Composition-driven transition to the crystalline state is characteristic of amorphous metal alloys and is widely observed in thin film. However, the transition zone (compositional range between single-phase amorphous and crystalline films) remains unexplored. Here, we demonstrate that this transition offers an excellent scenario for the fabrication of hybrid crystalline-amorphous architectures. The peculiar morphology of these nano(micro)structured films provides a simple bottom-up route, applicable to a broad range of alloys, for obtaining adjustable multifunctional surfaces. In particular, we prove the feasibility of this approach as a one-step process for a precise control of specular and diffuse reflectance over the visible spectrum. Further, the growth kinetics of the formed two-phase nanostructures is demonstrated equivalent to a 2-dimensional amorphous-to-crystalline phase transformation.Using Zr-W alloys as a model system, fundamental parameters of the growth process and the corresponding metastable thickness-composition phase diagram are extracted. It evidences that the two-phase nanostructures, despite occurring in a wide range of compositions, can be easily hidden experimentally by growth kinetics and nucleation delay. These results open a new avenue on the surface morphology and related functional properties control in thin films.

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“…5). The ductile coating is also able to deform with the sintered metal during dicing, thereby remaining adhered to the substrate and avoiding delamination 20 . Note however that the benefits of the coating in the term of chipping area fraction and kerf depth were not as pronounced when applied to Si workpieces.…”

Section: Resultsmentioning

confidence: 99%

Metallic glass coating for improving diamond dicing performance

Chu

Lai

Yiu

et al. 2020

Sci Rep

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This is the first report on the coating of diamond dicing blades with metallic glass (MG) coating to reduce chipping when used to cut Si, SiC, sapphire, and patterned sapphire substrates (PSS). The low coefficient-of-friction (CoF) of Zr-based MG-coated dicing blades was shown to reduce the number and size of chips, regardless of the target substrate. Overall, SiC, sapphire and PSS were most affected by chipping, due to the fact that higher cutting forces were needed for the higher hardness of SiC, sapphire and PSS. Compared to the bare blade, the MG coating provided the following reductions in chipping area: Si (~ 23%), SiC (~ 36%), sapphire (~ 45%), and PSS (~ 33%). The proposed coating proved particularly effective in reducing chips of larger size (> 41 µm in chipping width), as indicated by an ~ 80% reduction when cutting sapphire. Small variations in kerf angle and depth demonstrate the durability of the coated blades, which would no doubt enhance consistency in dicing performance and extend the blade lifespan. Finite-element modeling revealed significant reductions in tensile stress and elastic-plastic deformation during dicing, thanks to a lower CoF. Diamond abrasive blades are widely used to cut silicon, SiC, and sapphire dies in the manufacture of semiconductors and optoelectronic devices 1-3. The brittleness of these hard workpieces inevitably leads to chipping and/ or other types of damage, which might also give rise to failure in dies and chips, eventually causes yield loss 4-6. Space between dies, called streets is usually spared to accommodate chipping on both sides of the dicing kerf. Yet this approach reduces the number of die per wafer and thus is a waste of very expensive substrate material. Researchers have sought to improve cutting quality by adjusting the concentration and size of diamond grit 7,8 as well as the bonding material 7,9. Note also that it is essential to minimize the number and size of chips due to the fact that even undetectable chipping provides sites for potential failure under the application of a strong electrical field. Controlling the factors that lead to chipping also has benefits for the environment, by reducing the amount of water required for cooling and decreasing the amount of waste debris. This is the first report on coating diamond dicing blades with thin film metallic glass (TFMG) to reduce chipping when used to cut Si, SiC, sapphire, and patterned sapphire substrates (PSS). We focused on these workpieces due to their wide-scale use in semiconductors and light-emitting diodes. This is the first application of a coating on diamond dicing blades to enhance dicing performance. The thin film metallic glass (TFMG) coating in this study has a low coefficient of friction (CoF) and notable glass transition and crystallization characteristics 10,11. Multicomponent amorphous metallic films are an attractive alternative to conventional alloys, thanks to their smooth surface, high hardness, and high ductility as well as low-temperature processing (e.g., sputter deposition). T...

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Fracture-resistant thin-film metallic glass: Ultra-high plasticity at room temperature

Cited by 22 publications

References 46 publications

Influence of thin-film metallic glass coating on fatigue behavior of bulk metallic glass: Experiments and finite element modeling

Influence of thin-film metallic glass coating on fatigue behavior of bulk metallic glass: Experiments and finite element modeling

Composition-driven transition from amorphous to crystalline films enables bottom-up design of functional surfaces

Metallic glass coating for improving diamond dicing performance

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