Fractal-like Mechanical Resonators with a Soft-Clamped Fundamental Mode

Fedorov, Sergey A.; Beccari, Alberto; Engelsen, Nils J.; Kippenberg, Tobias J.

doi:10.1103/physrevlett.124.025502

Cited by 40 publications

(38 citation statements)

References 36 publications

(55 reference statements)

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“…Recently an alternative technique, specifically the use of hierarchical structures, has been proposed and experimentally realized to exhibit a large degree of soft clamping. [ 45,113 ] These resonators consist of cascading branches of beams, forming junctions under tension between the clamping points and the center of the resonator. At these junctions the overall curvature of the mode is lessened, compared to that of a single beam.…”

Section: Soft Clampingmentioning

confidence: 99%

Nanomechanical Dissipation and Strain Engineering

Sementilli

Romero

Bowen

2021

Adv Funct Materials

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Nanomechanical resonators have applications in a wide variety of technologies ranging from biochemical sensors to mobile communications, quantum computing, inertial sensing, and precision navigation. The quality factor of the mechanical resonance is critical for many applications. Until recently, mechanical quality factors rarely exceeded a million. In the past few years however, new methods have been developed to exceed this boundary. These methods involve careful engineering of the structure of the nanomechanical resonator, including the use of acoustic bandgaps and nested structures to suppress dissipation into the substrate, and the use of dissipation dilution and strain engineering to increase the mechanical frequency and suppress intrinsic dissipation. Together, they have allowed quality factors to reach values near a billion at room temperature, resulting in exceptionally low dissipation. This review aims to provide a pedagogical introduction to these new methods, primarily targeted to readers who are new to the field, together with an overview of the existing state‐of‐the‐art, what may be possible in the future, and a perspective on the future applications of these extreme‐high quality resonators.

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Section: Soft Clampingmentioning

confidence: 99%

Nanomechanical Dissipation and Strain Engineering

Sementilli

Romero

Bowen

2021

Adv Funct Materials

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“…A) Illustration of the mechanical resonator and target vibration modes for a high-quality-factor resonator. Unlike fundamental modes, [20,22] or higher-order modes, [15] the target mode shape for lower-order mode had not been discovered. B) Quality factor (Q m ) versus frequency (f m ) for a double clamped 50 nm-thick, 3 mm-long silicon nitride beam.…”

Section: Introductionmentioning

confidence: 99%

“…Previous works have focused on increasing Q m of the fundamental mode with strain engineering, [6,20] including design strategies as topology optimization [17,28] or hierarchical designs. [16,22] Here we pursue high quality factors at lower frequencies by following a new approach inspired by nature and guided by machine learning.…”

Section: Introductionmentioning

confidence: 99%

Spiderweb Nanomechanical Resonators via Bayesian Optimization: Inspired by Nature and Guided by Machine Learning

et al. 2021

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temperature conditions where thermomechanical noise can dominate. The degree of mechanical isolation is characterized by a resonator's mechanical quality factor, Q m . Typically, Q m is defined as the ratio of energy stored in a resonator over the energy dissipated over one cycle of oscillation. Inversely, mechanical quality factors can indicate the dissipation of mechanical noise into a resonator from ambient environments. For mechanical sensors, a resonator's isolation from ambient thermal noise can greatly enhance their ability to detect ultrasmall forces, pressures, positions, masses, velocities, and accelerations. For quantum technologies, mechanical quality factor dictates the average number of coherent oscillations a nanomechanical resonator (in the quantum regime) can undergo before one phonon of thermal noise enters the resonator and causes decoherence of its quantum properties. [1] From microchip sensing to quantum networks, cryogenics are conventionally required to counteract thermal noise but enabling these burgeoning technologies to operate in ambient temperatures would have a significant impact on their widespread use.In room-temperature environments, on-chip mechanical resonators with state-of-the-art quality factors have mostly consisted of high-aspect-ratio suspended nanostructures From ultrasensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room-temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes, which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bioinspired resonator is then fabricated, experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room-temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design that does not require sub-micrometer lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. These results demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.

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“…A Illustration of the mechanical resonator and target vibration modes for a high quality factor resonator. Unlike fundamental modes [2,3], or higher-order modes [4], the target mode shape for lower-order mode hadn't been discovered. B Quality factor (Qm) versus frequency (fm) for a double clamped 50 nm thick 3 mm long silicon nitride beam.…”

mentioning

confidence: 99%

“…These lines help illustrate the design region in the graph's top left corner that remains largely unexplored in current resonators that aim mainly for high quality factor. Previous works have focused on increasing Q m of the fundamental mode with strain engineering [2,9], including design strategies as topology optimization [19,28] or hierarchical designs [3,18]. Here we pursue high quality factors at lower frequencies by following a new approach inspired by nature and guided by machine learning.…”

mentioning

confidence: 99%

Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning

Shin,

Cupertino,

de Jong

et al. 2021

Preprint

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From ultra-sensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes.Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bio-inspired resonator is then fabricated; experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design which does not require sub-micron lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. Here we demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology.

show abstract

Fractal-like Mechanical Resonators with a Soft-Clamped Fundamental Mode

Cited by 40 publications

References 36 publications

Nanomechanical Dissipation and Strain Engineering

Nanomechanical Dissipation and Strain Engineering

Spiderweb Nanomechanical Resonators via Bayesian Optimization: Inspired by Nature and Guided by Machine Learning

Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning

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