FPCB Ring-Square Electrode Sandwiched Micromirror-Based Laser Pattern Pointer

Zuo, Haoyi; He, Siyuan

doi:10.1109/tie.2017.2674594

Cited by 23 publications

(17 citation statements)

References 25 publications

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“…The correlation coefficient r can reach 0.9995. This is well consistent with the theoretical relation determined by Equation (13). The sensitivity of the angle sensor can be determined as 55.0 mVp/°, which is also very close to the theoretical value of 55.2 mVp/°, calculated by Equation (13).…”

Section: Resultssupporting

confidence: 89%

“…where ϕ is the phase difference between the output voltage U s and the moving-induced electromotive force ε s . Equations (13) and (14) give the relationship of the output voltage of the sensor and the deflection angle of the micromirror considering the coupling effect in theory. Figure 3a shows the schematic drawing of the measurement setup of the angle sensor.…”

Section: Principle and Modelingmentioning

confidence: 99%

“…However, conventional Si-based MEMS (microelectromechanical systems) micromirrors cannot meet the requirements because large-aperture and low-frequency Si micromirrors are fragile, and cannot survive the environmental shocks and vibrations [8,11]. In comparison, flame retardant 4 (FR4)-based micromirrors are more promising, due to the inherent flexibility of FR4 [7,[12][13][14]. Until now, FR4 is the most widely used material for printed circuit boards (PCBs).…”

Section: Introductionmentioning

confidence: 99%

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Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Wen

Lei

et al. 2018

Applied Sciences

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This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.

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Section: Resultssupporting

confidence: 89%

Section: Principle and Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Wen

Lei

et al. 2018

Applied Sciences

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“…These structures act based on applied voltages induced on electrodes. Examples of such structures include tunable micro capacitors [1,2], micro pumps [3,4], microphones [5], gyroscopes [6,7], accelerometers [8,9], and micro mirrors [10][11][12]. The applied voltage between two electrodes and the changes in its magnitude changes the relative position of the capacitive electrodes and consequently causes to change in capacitance.…”

Section: Introductionmentioning

confidence: 99%

Multi input versus single input sliding mode for closed-loop control of capacitive micro structures

et al. 2019

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Considering the importance of closed-loop control for control of capacitive microstructures and the high capability of the sliding-mode controllers in control of nonlinear systems, the present study has investigated the closed-loop control of these structures using the sliding-mode controller. For this purpose, the sliding-mode controller was designed for single-and double-input cases, and the applied voltages between the capacitive electrodes was considered as the control inputs. The simulation results for both single-and double-input cases have been extracted and presented, and it was concluded that achieving an accurate control for the single input case is not always feasible given that the sign of the sliding surface changes and the control parameter assume positive definite values. Moreover, it has been shown that an accurate control could be achieved by employing the double-input controller without any limitations. The chattering phenomenon was also thoroughly studied in the initial controller design. To eliminate this phenomenon, a smooth variation has been applied to the switching of the sliding surface. In addition to tracking, the capacitive microstructure has been investigated to reduce the relative distance between the two electrodes (in order to increase the capacitive storage), and the obtained results have been presented.

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“…Currently, a low-frequency scanning and large-aperture micromirror is required for a broad spectrum of applications, such as micro-spectrometers [ 4 ], laser projection [ 16 , 17 , 18 ], fluorescence microscopes [ 19 ] and so on. It has been a continuous and ongoing task to find a proper alternative in order to meet the vast application demand.…”

Section: Introductionmentioning

confidence: 99%

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

Lei

Wen

et al. 2018

Micromachines

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This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a commercial printed circuit board (PCB) technology at a low cost and with a short process cycle, before an aluminum-coated silicon mirror plate with a large aperture is bonded on the FR4 platform to provide a high surface quality. In particular, an electromagnetic angle sensor is integrated to monitor the motion of the micromirror in real time. A prototype has been assembled and tested. The results show that the micromirror can reach the optical scan angle of 11.2° with a low driving voltage of only 425 mV at resonance (361.8 Hz). At the same time, the signal of the integrated angle sensor also shows good signal-to-noise ratio, linearity and sensitivity. Finally, the reliability of the FR4 based micro-mirror has been tested. The prototype successfully passes both shock and vibration tests. Furthermore, the results of the long-term mechanical cycling test (50 million cycles) suggest that the maximum variations of resonant frequency and scan angle are less than 0.3% and 6%, respectively. Therefore, this simple and robust micromirror has great potential in being useful in a number of optical microsystems, especially when large-aperture or low-frequency is required.

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FPCB Ring-Square Electrode Sandwiched Micromirror-Based Laser Pattern Pointer

Cited by 23 publications

References 25 publications

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Multi input versus single input sliding mode for closed-loop control of capacitive micro structures

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

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