FPCB Micromirror-Based Laser Projection Availability Indicator

Zuo, Haoyi; He, Siyuan

doi:10.1109/tie.2016.2516965

Cited by 33 publications

(37 citation statements)

References 44 publications

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“…However, the second type needs to bond the mirror plate onto a released and fragile micro actuator, which is very difficult and then leads to a low bonding yield due to the low strain limit of the silicon flexible structure. In order to overcome this problem, flexible printed circuit board (FPCB) micromirrors were proposed and developed in [23,24,25,26] by the authors of the present paper, which have the mirror plate bonded to the FPCB structure. The flexible parts of FPCB structure are the polyimide layer or polyimide plus copper film laminate layer, which has a higher strain limit than silicon.…”

Section: Introductionmentioning

confidence: 99%

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

Periyasamy

Tan

et al. 2019

Micromachines

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An external electromagnet plus moving PM (permanent magnet) FPCB (flexible printed circuit board) micromirror is proposed in this paper that can overcome two limitations associated with the previous FPCB micromirror with a configuration of an external PM plus moving coil, i.e., (1) it reduces the overall width beyond the mirror plate, and (2) increases the maximum rotation angle. The micromirror has two external electromagnets underneath an FPCB structure (two torsion beams and a middle seat) with two moving PM discs attached to the back and a metal-coated mirror plate bonded to the front of the FPCB middle seat. Modeling and simulation were introduced, and the prototype was fabricated and tested to verify the design. The achieved performance was better than that of the previous design: a maximum resonant rotation angle of 62° (optical) at a driving voltage of ±3 V with a frequency of 191 Hz, the required extra width beyond the mirror plate was 6 mm, and an aperture of 8 mm × 5.5 mm with a roughness of <10 nm and a flatness of >10 m (ROC, radius of curvature). The previous FPCB micromirror’s performance was: strain limited maximum rotation angle was 40° (optical), the extra width beyond the mirror plate was 14.7 mm, and had an aperture of 4 mm × 4 mm with a similar roughness and flatness.

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Section: Introductionmentioning

confidence: 99%

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

Periyasamy

Tan

et al. 2019

Micromachines

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“…Currently, a low-frequency scanning and large-aperture micromirror is required for a broad spectrum of applications, such as micro-spectrometers [ 4 ], laser projection [ 16 , 17 , 18 ], fluorescence microscopes [ 19 ] and so on. It has been a continuous and ongoing task to find a proper alternative in order to meet the vast application demand.…”

Section: Introductionmentioning

confidence: 99%

“…Moreover, the surface quality of the metal-based micromirror is inferior to that of the silicon micromirror. Another inexpensive yet highly suitable candidate is flame retardant4 (FR4) [ 17 , 18 , 23 ], which is inherently a soft material with a low Young’s modulus of about 20 Mpa. It is the most widely used material for printed circuit boards (PCB) due to its good electrical, mechanical and thermal properties.…”

Section: Introductionmentioning

confidence: 99%

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

Lei

Wen

et al. 2018

Micromachines

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This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a commercial printed circuit board (PCB) technology at a low cost and with a short process cycle, before an aluminum-coated silicon mirror plate with a large aperture is bonded on the FR4 platform to provide a high surface quality. In particular, an electromagnetic angle sensor is integrated to monitor the motion of the micromirror in real time. A prototype has been assembled and tested. The results show that the micromirror can reach the optical scan angle of 11.2° with a low driving voltage of only 425 mV at resonance (361.8 Hz). At the same time, the signal of the integrated angle sensor also shows good signal-to-noise ratio, linearity and sensitivity. Finally, the reliability of the FR4 based micro-mirror has been tested. The prototype successfully passes both shock and vibration tests. Furthermore, the results of the long-term mechanical cycling test (50 million cycles) suggest that the maximum variations of resonant frequency and scan angle are less than 0.3% and 6%, respectively. Therefore, this simple and robust micromirror has great potential in being useful in a number of optical microsystems, especially when large-aperture or low-frequency is required.

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“…Scanning micromirrors are essential core elements in various optical microsystems (e.g., barcode reader, endoscopic probe, and LiDAR) [1][2][3][4]. Especially, a large-aperture and low-frequency micromirror is required for a broad range of applications, such as fluorescence microscopes [5], laser projection [6,7], micro-spectrometers [8][9][10], etc. However, conventional Si-based MEMS (microelectromechanical systems) micromirrors cannot meet the requirements because large-aperture and low-frequency Si micromirrors are fragile, and cannot survive the environmental shocks and vibrations [8,11].…”

Section: Introductionmentioning

confidence: 99%

“…However, conventional Si-based MEMS (microelectromechanical systems) micromirrors cannot meet the requirements because large-aperture and low-frequency Si micromirrors are fragile, and cannot survive the environmental shocks and vibrations [8,11]. In comparison, flame retardant 4 (FR4)-based micromirrors are more promising, due to the inherent flexibility of FR4 [7,[12][13][14]. Until now, FR4 is the most widely used material for printed circuit boards (PCBs).…”

Section: Introductionmentioning

confidence: 99%

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Wen

Lei

et al. 2018

Applied Sciences

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This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.

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FPCB Micromirror-Based Laser Projection Availability Indicator

Cited by 33 publications

References 44 publications

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

External Electromagnet FPCB Micromirror for Large Angle Laser Scanning

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

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