“…One device structure for which propagation loss is particularly critical is the microring resonator (MRR). MRRs provide an efficient cavity which has a compact size, wavelength selectivity, tunability, scalability, and functional versatility [7], making them a prominent candidate for a variety of applications including lasers [8,9], optical sensors [10], nonlinear optics [11,12], quantum optics [13], (de-)multiplexing systems [14], optical filters [15], and optical modulators [16]. The loss in MRRs can be quantified by the cavity Q factor, which is typically limited to values on the order of 10 5 in standard 220 nm-high single-mode silicon MRRs around 1550 nm.…”