Four Point Probe Micro-Optical Gyroscope With Self Calibration Control

Mitatha, S.; Sirawattananon, C.; Ali, Jalil; Yupapin, P.P.

doi:10.1109/jsen.2013.2259591

Cited by 1 publication

(1 citation statement)

References 13 publications

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“…The gyroscope is comprised of a modified add/drop filter known as a PANDA ring resonator which consists of a single ring resonator with two lateral nano-ring resonators. The gyroscope can detect rotating angular velocity and horizontal velocity according to the different phase shift [ 121 , 122 ].…”

Section: Micromachined Gyroscope Developmentmentioning

confidence: 99%

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Xia

Kong

2014

Sensors

191

107

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This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

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Section: Micromachined Gyroscope Developmentmentioning

confidence: 99%