FORMING OF A 128X128 MULTIELEMENT IR-PHOTODETECTORS BASED ON CdHgTe

Abstract

Àíîòàö³ÿ. Ïðèâåäåíî ðåçóëüòàòè ðîá³ò ïî ñòâîðåííþ áàãàòîåëåìåíòíèõ ôîòîïðèéìàëüíèõ ïðèñòðî¿â ³íôðà÷åðâîíîãî ä³àïàçîíó íà îñíîâ³ CdHgTe. Çàïðîïîíîâàíî ðÿä îðèã³íàëüíèõ òåõíîëîã³÷íèõ ð³øåíü, ç óðàõóâàííÿì ìåõàí³÷íèõ òà åëåêòðîô³çè÷íèõ îñîáëèâîñòåé òîíêîïë³âêîâîãî CdHgTe, çîêðåìà: ïàñèâàö³ÿ ïîâåðõí³ åï³òàêñ³éíèõ ïë³âîê CdHgTe, ìî-äèô³êàö³ÿ ðåaeèì³â ôîòîë³òîãðàô³÷íèõ ïðîöåñ³â, áàãàòîøàðîâà ìåòàë³çàö³ÿ òà ïðåöèç³éíà ã³áðèäèçàö³ÿ. Çà äîïîìîãîþ ðîçðîáëåíî¿ òåõíîëî㳿 áóëî ñôîðìîâàíî ìàòðèö³ ôîòîïðèéìà-÷³â ôîðìàòó 128õ128 åëåìåíò³â.