Abstract:The properties of carbon layers (C-layers) formed by thermal decomposition of CCl4 at temperatures of 600-700oC on the surface of gallium arsenide structures fabricated by MOC-hydride epitaxy on n+-GaAs (100) wafers have been studied. The surface morphology of the carbon layers was studied using atomic force microscopy. The structural and optical properties were studied using Raman spectroscopy and reflection spectroscopy. It has been found that in the case of a C-layer fabricated at a temperature of 650-700oC… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.