2023
DOI: 10.21883/pss.2023.04.56009.9
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Formation of vertical graphene on surface of the gallium-arsenide structures

Abstract: The properties of carbon layers (C-layers) formed by thermal decomposition of CCl4 at temperatures of 600-700oC on the surface of gallium arsenide structures fabricated by MOC-hydride epitaxy on n+-GaAs (100) wafers have been studied. The surface morphology of the carbon layers was studied using atomic force microscopy. The structural and optical properties were studied using Raman spectroscopy and reflection spectroscopy. It has been found that in the case of a C-layer fabricated at a temperature of 650-700oC… Show more

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