2022
DOI: 10.3389/fmats.2022.977869
|View full text |Cite
|
Sign up to set email alerts
|

Formation of silicon layer through aluminothermic reduction of quartz substrates

Abstract: Silicon (Si) films were obtained through aluminothermic reduction of the quartz (SiO2) substrates, where the surface of the quartz in contact with the deposited aluminum (Al) layer has been converted to film Si during high-temperature annealing following reduction reaction. X-ray diffraction (XRD) patterns and Raman spectra show dominating peaks corresponding to elemental Si in the obtained films. Energy dispersive spectroscopy (EDS), as well as XRD of the obtained Si layer, suggests that reduction products co… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
4
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(4 citation statements)
references
References 51 publications
0
4
0
Order By: Relevance
“…CSS proceeds under pressure in normal ambient air [22] and is thus different from a similar process with sputtered Al on quartz performed at 650 or 700 °C under vacuum conditions, resulting in a layer of Si mixed with oxides of Al-related phases. [26] For trace analysis of the silicon layer secondary ion mass spectrometry (SIMS) was performed. Depth profiles of impurity concentrations in CSS silicon were analyzed by sputtering with 5.5 keV O 2 + ions on the same sample investigated in the SEM/EDX analyses.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…CSS proceeds under pressure in normal ambient air [22] and is thus different from a similar process with sputtered Al on quartz performed at 650 or 700 °C under vacuum conditions, resulting in a layer of Si mixed with oxides of Al-related phases. [26] For trace analysis of the silicon layer secondary ion mass spectrometry (SIMS) was performed. Depth profiles of impurity concentrations in CSS silicon were analyzed by sputtering with 5.5 keV O 2 + ions on the same sample investigated in the SEM/EDX analyses.…”
Section: Resultsmentioning
confidence: 99%
“…CSS proceeds under pressure in normal ambient air [ 22 ] and is thus different from a similar process with sputtered Al on quartz performed at 650 or 700 °C under vacuum conditions, resulting in a layer of Si mixed with oxides of Al‐related phases. [ 26 ]…”
Section: Resultsmentioning
confidence: 99%
“…The Fe:Si ratios of each film were quantified from these EDX peaks as summarized in Table 1 , where the composition of Fe 3 Si films turns into that of the FeSi at 600 °C and then FeSi 2 's composition at 800 °C, helping to cement the implication of atomic diffusion as the culprit of the drastic change in the film's properties. The increasing appearance of Si(111) after RTA at increasing T RTA value is likely to originate from the fusion between films and substrate, as backed up by the contradictory results of surface profiling and cross-sectional imagery [ 31 ].
Fig.
…”
Section: Resultsmentioning
confidence: 99%
“…The silicon element in TAD 3D was mainly distributed in the porous area. The dense ceramic layer at the interface may be due to the fact that during the composite process, the aluminum melt reacted with SiO 2 in TAD 3D to reduce SiO 2 near the interface to the Si, and the Si diffused into the aluminum melt [30]. It may also be caused by the unevenness of the ceramic itself.…”
Section: Microstructure Of Tad3d/5a05almentioning
confidence: 99%