Nuclear Instruments and Methods in Physics Research Section B:
1998
DOI: 10.1016/s0168-583x(98)00196-7
|View full text |Cite
|
Sign up to set email alerts
|

Formation of silicon carbide and nitride by ECR microwave plasma immersion ion implantation

Kerstin Volz
1
,
Wolfgang Ensinger
2
,
B. Rauschenbach
3
et al.
Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

2001
2001
2009
2009

Publication Types

Select...
5

Relationship

0
5

Authors

Journals

citations
Cited by 12 publications
references
References 12 publications
0
0
0
Order By: Relevance

Characterization and corrosion stability of SiC coatings using ion beam analysis techniques

Noli
1
,
Μisaelides
2
,
Theodossiou
3
et al. 2006
Nuclear Instruments and Methods in Physics Research Section B:
1
0
0
0
View full textAdd to dashboardCite

Characterization and corrosion stability of SiC coatings using ion beam analysis techniques

Noli
1
,
Μisaelides
2
,
Theodossiou
3
et al. 2006
Nuclear Instruments and Methods in Physics Research Section B:
1
0
0
0
View full textAdd to dashboardCite

Enhancement of the corrosion resistance of a Ti-based alloy by ion beam deposition methods

Noli
1
,
Μisaelides
2
,
Rivière
3
2009
Nuclear Instruments and Methods in Physics Research Section B:
4
0
2
0
View full textAdd to dashboardCite

The effect of methane dose and post annealing treatment on the formation of nano β-SiC buried layer in the silicon

Dibaji
1
,
Larijani
2
,
Novinrooz
3
et al. 2009
Surface and Coatings Technology
2
0
5
0
View full textAdd to dashboardCite
scite logo

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Product
Browser ExtensionAssistant by sciteCitation Statement SearchReference CheckVisualizationsDashboardsExplore JournalsExplore OrganizationsExplore FundersEmbedding BadgeEmbedding Citation SearchPricing
Resources
BlogHelp & FAQAccessibility StatementAPI TermsFor Universities & GovernmentsFor ResearchersFor PublishersFor Corporate, Pharma & EnterpriseAuthor MarketingBecome an AffiliateGet an organization trial or quotescite Data & Services
About
News & PressCareersRead our PaperCoverage

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

BlogTerms and ConditionsAPI TermsPrivacy PolicyContactCookie PreferencesDo Not Sell or Share My Personal Information

Copyright © 2024 scite LLC. All rights reserved.

Made with 💙 for researchers

Part of the Research Solutions Family.