Formation of preferentially oriented Y 3 Al 5 O 12 film on a reactive sapphire substrate: Phase and texture transitions from Y 2 O 3

Arakawa, Shuichi; Kadoura, Hiroaki; Uyama, Takeshi; Takatori, Kazumasa; Takeda, Yasuhiko; Tani, Toshihiko

doi:10.1016/j.jeurceramsoc.2015.10.021

Cited by 4 publications

(1 citation statement)

References 34 publications

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“…At 1100 °C, the XRD pattern changes significantly and new broad lines become visible, in particular at 29° and 35°. Those new lines are attributed to the monoclinic yttrium aluminate (YAM) Y 4 Al 2 O 9 (JCPDS card 00‐034‐0368) . This indicates that the deposited yttria layer has reacted with the substrate at this temperature and that the ions are located in a different crystalline environment.…”

Section: Resultsmentioning

confidence: 99%

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y₂O₃ Thin Films through Optimized Thermal Annealing

Scarafagio

Tallaire

Chavanne

et al. 2020

Physica Status Solidi (a)

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Crystalline rare‐earth (RE)‐doped Y2O3 films are an attractive system for a wide range of photonics applications including quantum technologies which aim at harnessing optical or spin transitions with long coherence times to achieve new functionalities such as quantum storage or information processing. Herein, atomic layer deposition (ALD) of Eu‐doped Y2O3 thin films with improved optical properties is presented. A crucial post‐treatment step to obtain high‐quality films is annealing at elevated temperatures (>900 °C). However, the main drawback of this approach is the formation of unwanted parasitic phases due to reaction at the interface with the substrate, especially with silicon. In this article, this issue is discussed for different kinds of substrates and buffer layers. The use of such modified substrates allows advantageously extending the maximum thermal treatment up to 1150 °C without being limited by interface reactions. It is demonstrated that the emission of the 5D0 → 7F2 transition for Eu3+ in Y2O3 film can be as narrow as that of bulk materials when optimized thermal treatments and a thin undoped Y2O3 buffer layer are used. Thus, a versatile method to reduce the impact of the substrate–film interface on the optical properties is proposed.

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Section: Resultsmentioning

confidence: 99%

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y₂O₃ Thin Films through Optimized Thermal Annealing

Scarafagio

Tallaire

Chavanne

et al. 2020

Physica Status Solidi (a)

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Highly textured zinc aluminate: Nd, Ce films over sapphire for NIR emitting applications

Rojas-Hernández

Rubio‐Marcos

Serrano

et al. 2023

Ceramics International

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Reaction kinetics in the system Y2O3/Al2O3 – A solid state reaction forming multiple product phases investigated by using thin film techniques

Korte

Franz

2021

Solid State Ionics

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Formation of preferentially oriented Y 3 Al 5 O 12 film on a reactive sapphire substrate: Phase and texture transitions from Y 2 O 3

Cited by 4 publications

References 34 publications

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y₂O₃ Thin Films through Optimized Thermal Annealing

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y₂O₃ Thin Films through Optimized Thermal Annealing

Highly textured zinc aluminate: Nd, Ce films over sapphire for NIR emitting applications

Reaction kinetics in the system Y2O3/Al2O3 – A solid state reaction forming multiple product phases investigated by using thin film techniques

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Formation of preferentially oriented Y 3 Al 5 O 12 film on a reactive sapphire substrate: Phase and texture transitions from Y 2 O 3

Cited by 4 publications

References 34 publications

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y2O3 Thin Films through Optimized Thermal Annealing

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y2O3 Thin Films through Optimized Thermal Annealing

Highly textured zinc aluminate: Nd, Ce films over sapphire for NIR emitting applications

Reaction kinetics in the system Y2O3/Al2O3 – A solid state reaction forming multiple product phases investigated by using thin film techniques

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Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y₂O₃ Thin Films through Optimized Thermal Annealing

Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y₂O₃ Thin Films through Optimized Thermal Annealing