Formation of PbTiO3 films from multilayered structures of primitive oxides

Abstract

The possibility of the formation of PbTiO 3 from a multilayer structure of PbO and TiO 2 layers on Pt-coated Si substrates prepared by rapid thermal metal organic chemical vapor deposition (RTMOCVD) followed by an appropriate annealing process was examined. The metal organic precursors of PbO and TiO 2 were Pb(C 2 H 5 ) 4 and Ti(Oi-C 3 H 7 ) 4 , respectively. The composition of the PbTiO 3 thin film was adjusted by control of the thickness of each binary oxide layer of PbO and TiO 2 . The multilayer structure was converted into crystalline PbTiO 3 by rapid thermal annealing under O 2 ambient at temperature greater than 550 o C. As the annealing temperature was increased from 550 to 750 o C, the peaks related to perovskite PbTiO 3 in the XRD patterns became stronger and sharper. From this study, it was confirmed that the crystalline PbTiO 3 thin films could be prepared from the interdiffusion reaction of multilayer structure composed of primitive binary oxides through the appropriate post annealing process.