2021
DOI: 10.1007/978-3-030-80946-1_93
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Formation of Nanosized Films of Chromium Silicides on Silicon Surface

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Cited by 2 publications
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“…Currently, transition metal silicides are becoming the base material for new, promising technological schemes of future generations due to their resistance to aggressive media and high-temperature treatments [6][7][8][9]. Therefore, a comprehensive study of the mechanism of the entry of impurities into the bulk of the crystal and their interaction with both the matrix atoms of the crystal and technological impurities is relevant.…”
Section: Introductionmentioning
confidence: 99%
“…Currently, transition metal silicides are becoming the base material for new, promising technological schemes of future generations due to their resistance to aggressive media and high-temperature treatments [6][7][8][9]. Therefore, a comprehensive study of the mechanism of the entry of impurities into the bulk of the crystal and their interaction with both the matrix atoms of the crystal and technological impurities is relevant.…”
Section: Introductionmentioning
confidence: 99%