Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

Tanaka, Miyoko; Shimojo, Makoto; Takeguchi, Masaki; Mitsuishi, Kazutaka; Furuya, Kazuo

doi:10.1016/j.jcrysgro.2004.11.337

Cited by 11 publications

(7 citation statements)

References 29 publications

(37 reference statements)

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“…This position controllability is a clear advantage of the nano-wiring by EBI-CVD, although cautious selection of the precursor gases is required to avoid the inevitable contamination of the deposits. 28 The present results also suggest that cubic Fe silicide islands on Si (111) surfaces that have almost perfect match with the substrate can take the form of NWs when the substrates are prepared in a way suitable for their growth. Further investigation of combining surface engineering and EBI-CVD is being planned to achieve NW fabrication with complete control.…”

Section: Resultssupporting

confidence: 65%

Formation of metal nano‐wires on heat‐treated substrates using an ultrahigh vacuum transmission electron microscope

Tanaka¹,

Wagner²,

Takeguchi³

et al. 2006

Surface & Interface Analysis

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Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO 3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

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Section: Resultssupporting

confidence: 65%

Formation of metal nano‐wires on heat‐treated substrates using an ultrahigh vacuum transmission electron microscope

Tanaka¹,

Wagner²,

Takeguchi³

et al. 2006

Surface & Interface Analysis

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“…In this technique, a precursor material containing a magnetic element is injected in the process chamber and then dissociated by a focused electron beam. Typically, a Scanning Electron Microscope (SEM) is used for FEBID, and various scanning strategies allow for the growth of magnetic dots [10], nanowires [11], pillars and nano-helices [12,13], nanospheres [14], spin-ice structures [15], etc. FEBID is well suited to be used on unconventional substrates, such as cantilevers, leading to its application in magnetic force microscopy [16][17][18] and…”

Section: Introductionmentioning

confidence: 99%

High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced Deposition

Sanz-Martín

Magén

2019

Nanomaterials

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The growth of ferromagnetic nanostructures by means of focused-Ga + -beam-induced deposition (Ga + -FIBID) using the Co 2 (CO) 8 precursor has been systematically investigated. The work aimed to obtain growth conditions allowing for the simultaneous occurrence of high growth speed, good lateral resolution, low electrical resistivity, and ferromagnetic behavior. As a first result, it has been found that the competition between deposition and milling that is produced by the Ga + beam is a limiting factor. In our working conditions, with the maximum available precursor flux, the maximum deposit thickness has been found to be 65 nm. The obtained volumetric growth rate is at least 50 times higher than in the case of deposition by focused-electron-beam-induced deposition. The lateral resolution of the deposits can be as good as 50 nm while using Ga + -beam currents lower than 10 pA. The high metallic content of the as-grown deposits gives rise to a low electrical resistivity, within the range 20-40 µΩ·cm. Magnetic measurements confirm the ferromagnetic nature of the deposits at room temperature. In conclusion, the set of obtained results indicates that the growth of functional ferromagnetic nanostructures by Ga + -FIBID while using the Co 2 (CO) 8 precursor is a viable and competitive technique when compared to related nanofabrication techniques. Nanomaterials 2019, 9, 1715 2 of 12 magnetic resonance force microscopy, in sharp contrast to other nanofabrication techniques requiring resists [19]. Other reported applications of magnetic FEBID deposits comprise nanoactuation [20], domain-wall pinning [21], nano-Hall sensors [22], nanomagnetic logic [23], superconducting-vortex pinning [24,25], etc. In addition, the capability of FEBID for the growth of complex three-dimensional (3D) magnetic structures is being explored in the rising field of 3D nanomagnetism [26].FEBID has long suffered from two disadvantages when compared to other nanofabrication techniques: the material purity and the growth speed. In the last years, various growth strategies and post-growth purification treatments have been successfully developed to enhance the material purity of magnetic deposits that are grown by FEBID [27][28][29][30][31][32]. However, the growth speed of magnetic nanostructures by FEBID continues to be a bottleneck regarding its broader use. Existing literature on the topic indicates that the volumetric growth rate of nanostructures with the widely-used Co 2 (CO) 8 precursor is in the range of 0.002 µm 3 /nC [33]. Low electron currents must be used to obtain magnetic structures with good lateral resolution (below 1 nA), which gives rise to long growth times. As an example, the growth of a 100 nm-thick 1 µm 2 -rectangle takes 8 min. if an electron beam current of 100 pA is used.In the present work, we have systematically explored the possibility of using a Ga + focused ion beam to grow Co magnetic nanostructures with good lateral resolution, low electrical resistance, and high growth speed by means of the Focused Ion Beam Induced De...

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“…Diverse approaches have been followed to increase the purity of FEBID deposits, as reviewed by Botman et al in 2009 20 , and further explored since. This includes the growth on substrates at elevated temperatures [26][27][28] , in-situ annealing in high vacuum [29][30][31] , electron beam irradiation 32,33 , exposure to reactive atmospheres 34,35 , laser-assisted heating during deposition 36,37 , post-growth Joule heating upon injection of high electric currents 38 , ex-situ annealing 39,40 , supersonic jet delivery of precursor gas 41 , and combinations of all these methods 35,[42][43][44][45][46] . Astounding success has been achieved in growing virtually-pure Pt deposits by post-growth electron irradiation in oxygen atmosphere 34 , or functional Au plasmonic nanostructures by electron beam irradiation in water vapor atmosphere 13 .…”

mentioning

confidence: 99%

Purified and Crystalline Three-Dimensional Electron-Beam-Induced Deposits: The Successful Case of Cobalt for High-Performance Magnetic Nanowires

Pablo-Navarro

Magén

2017

ACS Appl. Nano Mater.

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Focused electron beam induced deposition (FEBID) is considered the ultimate direct-write lithography technique for three-dimensional (3D) structures.However, it has not been possible yet to obtain 3D deposits by FEBID with the same purity and crystallinity of the corresponding bulk materials. In the present work, purified and crystalline 3D cobalt nanowires of diameter below 90 nm have been fabricated by ex-situ high-vacuum annealing at 600 ºC after FEBID growth. While increasing the metallic content of the nanowires up to 95% at., the thermal annealing process induces the recrystallization of the pseudo-amorphous as-grown structure into bulk-like, hcp and fcc crystallites with lateral sizes comparable to the nanowire's width. The net magnetization increases 80% with respect to as-grown values, up to 1.61  0.06 T, near bulk cobalt. This achievement opens new pathways for applications of this synthetic method in the fabrication of either individual or arrays of 3D high-purity and crystalline cobalt nanowires for high-density memory and logic devices, nanosensors and actuators, and could be a viable method to obtain other pure and crystalline 3D materials by FEBID.

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Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

Cited by 11 publications

References 29 publications

Formation of metal nano‐wires on heat‐treated substrates using an ultrahigh vacuum transmission electron microscope

Formation of metal nano‐wires on heat‐treated substrates using an ultrahigh vacuum transmission electron microscope

High Volume-Per-Dose and Low Resistivity of Cobalt Nanowires Grown by Ga+ Focused Ion Beam Induced Deposition

Purified and Crystalline Three-Dimensional Electron-Beam-Induced Deposits: The Successful Case of Cobalt for High-Performance Magnetic Nanowires

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