Formation of highly moisture-resistive SiNx films on Si substrate by Cat-CVD at room temperature

Minamikawa, Toshiharu; Heya, Akira; Niki, Toshikazu; Takano, Masahiro; Yonezawa, Yasuto; Muroi, Susumu; Minami, Shigehira; Masuda, Atsushi; Umemoto, Hironobu; Matsumura, Hideki

doi:10.1016/j.tsf.2005.07.173

Cited by 7 publications

(10 citation statements)

References 7 publications

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“…11-Azido-1-undecanol was synthesized from 11-bromo-1-undecanol and sodium azide according to the literature. 81 4,4,5,5,6,6,7,7,8,8,9,9, was purchased from Sigma-Aldrich. Alexa Fluor 555 azide (9) and the fluorescent labeled lectin Alexa Fluor 647 conjugate of PNA from Arachis hypogaea (peanut) were supplied by Invitrogen.…”

Section: Methodsmentioning

confidence: 99%

“…2,3 Silicon nitride coatings are also a resistant barrier to diffusion of sodium ions and moisture. 4 Therefore, this ceramic is commonly deposited in the microelectronic industry as a passivation layer in, for instance, integrated circuits and solar cells. 5−7 On the other hand, being not only an insulator, but also a material with excellent biocompatibility, Si 3 N 4 has received considerable attention in biosensing 8,9 and medical applications.…”

Section: Introductionmentioning

confidence: 99%

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Copper-Free Click Biofunctionalization of Silicon Nitride Surfaces via Strain-Promoted Alkyne–Azide Cycloaddition Reactions

et al. 2012

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Cu-free "click" chemistry is explored on silicon nitride (Si(3)N(4)) surfaces as an effective way for oriented immobilization of biomolecules. An ω-unsaturated ester was grafted onto Si(3)N(4) using UV irradiation. Hydrolysis followed by carbodiimide-mediated activation yielded surface-bound active succinimidyl and pentafluorophenyl ester groups. These reactive surfaces were employed for the attachment of bicyclononyne with an amine spacer, which subsequently enabled room temperature strain-promoted azide-alkyne cycloaddition (SPAAC). This stepwise approach was characterized by means of static water contact angle, X-ray photoelectron spectroscopy, and fluorescence microscopy. The surface-bound SPAAC reaction was studied with both a fluorine-tagged azide and an azide-linked lactose, yielding hydrophobic and bioactive surfaces for which the presence of trace amounts of Cu ions would have been problematic. Additionally, patterning of the Si(3)N(4) surface using this metal-free click reaction with a fluorescent azide is shown. These results demonstrate the ability of the SPAAC as a generic tool for anchoring complex molecules onto a surface under extremely mild, namely ambient and metal-free, conditions in a clean and relatively fast manner.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Copper-Free Click Biofunctionalization of Silicon Nitride Surfaces via Strain-Promoted Alkyne–Azide Cycloaddition Reactions

et al. 2012

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“…In a pulsed SiH 4 -NH 3 -N 2 plasma, a decrease in the refractive index with a reduction in the duty ratio was observed at most bias powers [9]. A decreased refractive index at lower temperatures was also reported as *Corresponding author: kbwhan@sejong.ac.kr ©KIM and Springer well as and a slightly increased deposition rate [10]. Meanwhile, SiN film with less hydrogen was deposited at room-temperature [11,12].…”

Section: Introductionmentioning

confidence: 99%

Room temperature, ion energy-controlled deposition of silicon nitride films in a SiH4-N2 plasma

2010

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In this study, silicon nitride films were deposited in SiH 4 -N 2 plasma using a plasma-enhanced chemical vapor deposition system at room-temperature. The radio frequency bias power impact on the films characteristics (deposition rate, refractive index, and surface roughness) was examined. Ion energy information (energy level, energy flux) collected using an ion energy analysis system was correlated with the film characteristics. Increasing the bias power increased the ion energy, more noticeably with the high ion energy. For the same variations in the bias power, the ion energy flux initially decreased considerably and then varied little. A similar variation was noticed in both film characteristics. Both the deposition rate and the refractive index were strongly correlated with the ratio of high ion energy to low ion energy rather than high or low ion energy. A similar dependency was also observed for the refractive index. The dependency of surface roughness changed from ion energy to ion energy flux. The roles of the ion energy flux were further examined by implicating them in AFM images. The low ion energy flux was identified as a contributor to the extreme peaks that significantly deteriorated the surface roughness. The highest deposition rate, highest refractive index, and smallest surface roughness obtained were 183 Å/min, 2.06, and 0.230 nm, respectively.

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“…For fabrications of silicon nitride, silicon carbon nitride and n-type nanocrystalline silicon carbide thin films, ammonia [1][2][3] and hexamethyldisilazane [4,5] are used as a N source. Ammonia is also used for nitriding of Si-wafer surface [6].…”

Section: Introductionmentioning

confidence: 99%

N2 decomposition by hot wire and N2 post-deposition treatment on hydrogenated microcrystalline silicon thin films

et al. 2009

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Formation of highly moisture-resistive SiNx films on Si substrate by Cat-CVD at room temperature

Cited by 7 publications

References 7 publications

Copper-Free Click Biofunctionalization of Silicon Nitride Surfaces via Strain-Promoted Alkyne–Azide Cycloaddition Reactions

Copper-Free Click Biofunctionalization of Silicon Nitride Surfaces via Strain-Promoted Alkyne–Azide Cycloaddition Reactions

Room temperature, ion energy-controlled deposition of silicon nitride films in a SiH4-N2 plasma

N2 decomposition by hot wire and N2 post-deposition treatment on hydrogenated microcrystalline silicon thin films

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