Formation of Cr-Zr gradient layer by magnetron sputtering and ion mixing

Abstract

The gradient Cr-Zr layer was formed onto Zr-1Nb substrate by magnetron sputtering of chromium and zirconium targets and ion mixing (Ar+ with 25 keV). The distribution of Cr and Zr elements in the deposited coatings was measured by using a glow discharge optical emission spectroscopy. The optimal ion fluence onto the substrate was 8×1019 ion/m2. At higher ion dose, the intensive sputtering of the deposited coating was observed.

Study of Coatings Formed on Zirconium Alloy by Plasma Electrolytic Oxidation in Electrolyte with Submicron Yttria Powder Additives

“…As methods of such protective coatings production, thermal spraying, physical vapor deposition, and chemical vapor deposition methods are most often used. Many studies in this area are associated with the deposition of metal coatings [4][5][6][7][8][9]. High efficiency is also shown by cermet multilayer coatings [10][11][12][13][14][15].…”