2008
DOI: 10.1002/cvde.200706662
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Formation of Continuous Nanocrystalline Diamond Layers on Glass and Silicon at Low Temperatures

Abstract: Nanocrystalline diamond thin films are grown on silicon and glass substrates by microwave plasma (MP)CVD from a gas mixture of methane and hydrogen at low substrate temperatures. The initial stages of diamond growth, i.e., i) the growth of individual nanometer-sized crystals and clusters, and ii) coalescence into a continuous layer, are investigated by diverse analytic techniques. Atomic force microscopy (AFM) measurements reveal nearly unchanging surface roughness up to 40 min. X-ray photoelectron spectroscop… Show more

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Cited by 81 publications
(62 citation statements)
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“…in coating of quartz or complementary metal oxide semiconductors. Kromka et al [19] investigated an impact of the low-temperature MW CVD process on optical properties of nanocrystalline diamond films (NCD) on silicon and quartz substrates; the films displayed a transmittance of ca. 70% and a high refractive index of 2.34 at the 550 nm wavelength.…”
Section: Introductionmentioning
confidence: 99%
“…in coating of quartz or complementary metal oxide semiconductors. Kromka et al [19] investigated an impact of the low-temperature MW CVD process on optical properties of nanocrystalline diamond films (NCD) on silicon and quartz substrates; the films displayed a transmittance of ca. 70% and a high refractive index of 2.34 at the 550 nm wavelength.…”
Section: Introductionmentioning
confidence: 99%
“…[38][39][40][41] In 1 mL of PLGA solution, 0.007 g of the ND powder was added and was homogeneously dispersed by mixing and sonication (Labsonic U-2000, B Braun Biotech, Goettingen, Germany, sonication time 5 seconds). The sonication was performed immediately before electrospinning in order to minimize clustering of diamond nanoparticles.…”
Section: Preparation Of Nanofibrous Membranesmentioning
confidence: 99%
“…Microcrystalline and large-grained polycrystalline diamond (PCD) films are generally composed by well-defined {100} and {111} facets. High-quality thin nanocrystalline (NCD) films [4,5] were grown from a very high initial nucleation density and these films exhibit a columnar growth, just as for microcrystalline diamond (MCD), except with nano-sized crystallites. Hence, these NCD films were considered as just smaller grained, facetted versions of MCD [6].…”
Section: Introductionmentioning
confidence: 99%