Formation of cones during sputtering

Gvosdover, R. S.; Efremenkova, V. M.; Shelyakin, L.B.; Yurasova, V. E.

doi:10.1080/00337577608243042

Cited by 56 publications

(6 citation statements)

References 14 publications

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“…Thus, while the anomalous sputtering rate practically does not depend on the target temperature, the latter is crucial factor in determination of the texturing degree. Such inhomogeneous structures as those demonstrated in figure 12 and created on the bombarded surfaces under the influence of the ion impacts were observed in plenty of experiments, carried out in other conditions [4,70,100], and cannot be considered as a smoking gun of the anomalous sputtering per se. Indeed, the texture elements of intricate form are the consequence of the surface instability due to massively torn bonds between atoms (ions) near the surface whatever the reason of the damage.…”

Section: Resultsmentioning

confidence: 86%

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New collective trampoline mechanism of accelerated ion-plasma sputtering

Gabovich

Semeniuk²,

Semeniuk³

2019

J. Phys. D: Appl. Phys.

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Results of the newly found anomalous accelerated plasma ion sputtering of solid-state targets are presented. The rate of sputtered particles comprises from one to several tens of atoms per one impinging ion, ion energies being in the range of tens to five hundreds electron volts. The anomalous sputtering is realized for ion current density in the plasma flow being not less than 10 mA cm −2 and threshold specific power of the ion flow from 0.7 to 2 W cm −2 depending on the target material. The qualitative explanation proposed dubbed 'collective trampoline accelerated sputtering'. The collective nature of this sputtering regime differs from the conventional pair collision cascade one. The trampoline sputtering leads to the intense texturing of the materials with submicron characteristic structure sizes. The new sputtering method could be applied (i) in the technology of plasma ion deposition of the functional coatings to replace the widespread magnetron sputtering sources of lower productivity; (ii) in the photovoltaics to solve the problem of the so-called 'black' multi-crystalline silicon in order to reduce the light reflectance coefficient; (iii) in the production of silicon composite anodes for lithium ion batteries to enhance their lifetimes regarding charge/discharge cycles, for which the final positive result is largely determined by the surface structure of the silicon wafer for photovoltaics and the surface structure of the anode current collector for lithium-ion batteries.

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Section: Resultsmentioning

confidence: 86%

“…pyramids, cones, and craters. Similar structures grow more slowly under bombardment by ions of E ≈ 20 ÷ 40 keV [4,70].…”

Section: Introductionmentioning

confidence: 99%

New collective trampoline mechanism of accelerated ion-plasma sputtering

Gabovich

Semeniuk²,

Semeniuk³

2019

J. Phys. D: Appl. Phys.

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“…The measurement of the analysis depth, D, is considered to be the most inaccurate parameter in this case. In general, the TA-LYSTEP surface profiler is accurate to less than 10% for depth measurements greater than 100 A; however, crater bottom roughness caused by sputtering of polycrystalline samples and additionally by "cone" formation (10) may cause the depth measurement to be inaccurate by as much as 30%.…”

Section: Calculationsmentioning

confidence: 97%

Ion implantation for in-situ quantitative ion microprobe analysis

Leta¹,

Morrison²

1980

Anal. Chem.

100

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“…By way of example, Fig. 8 shows the surface of a single-crystal copper sample (crystallographic plane, 001) after its sputtering by a beam of argon ions with an energy of 40 keV [26]. As the angle of incidence changes, the "cones" are modified, while the erosion remains nonuniform.…”

Section: Surface Effects Sputtering By Charge-exchange Particlesmentioning

confidence: 99%

Radiation Effects on the Components of Diagnostic Systems for a Thermonuclear Reactor: A Review

Gott

2005

Instrum Exp Tech

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The review is devoted to describing how irradiation with neutrons, fast particles, and γ rays affects components of the diagnostic equipment for a thermonuclear reactor. It is shown that the radiation environment inside a reactor and in the space around it has a significant (and sometimes crucial) effect on the diagnostic instruments. Unfortunately, the available data on radiation effects do not allow us to reliably estimate the resistance of a particular diagnostic component to radiation damage from neutrons, γ rays, and other particles. Specifically, the shortage of data on the effect of 14-MeV thermonuclear neutrons is a major problem. Therefore, the radiation testing of both the instruments' individual components of the instruments and diagnostic systems as a whole is in particular of paramount importance.

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Formation of cones during sputtering

Cited by 56 publications

References 14 publications

New collective trampoline mechanism of accelerated ion-plasma sputtering

New collective trampoline mechanism of accelerated ion-plasma sputtering

Ion implantation for in-situ quantitative ion microprobe analysis

Radiation Effects on the Components of Diagnostic Systems for a Thermonuclear Reactor: A Review

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