Formation of composite ternary nitride thin films by magnetron sputtering co-deposition

Sandu, Cosmin S.; Sanjinés, R.; Benkahoul, M.; Medjani, F.; Lévy, F.

doi:10.1016/j.surfcoat.2006.08.100

Cited by 96 publications

(82 citation statements)

References 21 publications

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“…The NbN films were also prepared by using magnetron sputtering (MS) [14][15][16][17][18], ion Contents lists available at ScienceDirect journal homepage: www.elsevier.com/locate/ceramint beam assisted deposition [19], pulsed laser deposition [20]. An increase in hardness was reached by the formation of the nanocomposite or nanolayered structures in ternary Nb-Si-N films [21][22][23][24][25][26][27][28][29]. Silicon nitride is known for its high temperature stability, low friction coefficient and high oxidation resistance.…”

Section: Introductionmentioning

confidence: 99%

“…This hardness enhancement was due to the specific nanocomposite structure of Nb-Si-N films that represented nano-sized NbN grains embedded in amorphous SiN x matrix [21][22][23][24][25][26]. An increase in hardness from 25 GPa to 34 GPa was explained in the framework of a two-step mechanism, i.e., by forming a solid solution of Si atom in NbN lattice and by forming a nanocomposite material [22][23][24]. The hardness of Nb-Si-N nanocomposite films reaches the maximum values of 30-34 GPa for 5-13 at% of Si [23].…”

Section: Introductionmentioning

confidence: 99%

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Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Pogrebnjak

Бондар

Abadias

et al. 2016

Ceramics International

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a b s t r a c tThe structural and mechanical properties of NbN and Nb-Si-N films have been investigated both experimentally and theoretically, in their as-deposited and annealed states. The films were deposited using magnetron sputtering at substrate bias (U B ) between 0 and À 70 V. While NbN films were found to crystallize in the cubic δ-NbN structure, Nb-Si-N films with Si content of 11-13 at% consisted of a twophases nanocomposite structure where δ-NbN nanocrystals were embedded in SiN x amorphous matrix.Films deposited at U B ¼0 V were highly (001)-textured. Application of substrate bias potential led to a depletion of light atoms, and caused a grain size refinement concomitantly with the increase of (111) preferred orientations in both films. The maximum hardness was 28 GPa and 32 GPa for NbN and Nb-Si-N films, respectively. NbN and Nb-Si-N films deposited at U B ¼ À70 V exhibited compressive stress of À 3 and À 4 GPa, respectively. After vacuum annealing, a decrease in the stress-free lattice parameter was observed for both films, and attributed to alteration of film composition. To obtain insights on interface properties and related mechanical and thermal stability of Nb-Si-N nanocomposite films, first principles molecular dynamics simulations of NbN/SiN x heterostructures with different structures (cubic and hexagonal) and atomic configurations were carried out. All the hexagonal heterostructures were found to be dynamically stable and weakly dependent on temperature. Calculation of the tensile strain-stress curves showed that the values of ideal tensile strength for the δ-NbN(111)-and ε-NbN(001)-based heterostructures with coherent interfaces and Si 3 N 4 -like Si 2 N 3 interfaces were the highest with values in the range 36-65 GPa, but lower than corresponding values of bulk NbN compound. This suggests that hardness enhancement is likely due to inhibition of dislocation glide at the grain boundary rather than interfacial strengthening due to Si-N chemical bonding.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Pogrebnjak

Бондар

Abadias

et al. 2016

Ceramics International

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“…12) [97]. At a Si concentration of more than 12 at %, a common structure is still present in the coating, although crystallites of different orientations are formed within each of the columns; as a consequence, excess stress is eliminated.…”

Section: Sem and Tem Studies Of Nbn-based Coatingsmentioning

confidence: 99%

“…It should be noted that the sizes of crystals in these nanocomposite coatings are as small as a few nanometers. The location and chemical composition of the amorphous SiN x phase has a dominant effect on the electrical and mechanical properties of the coating [60][61][62][63].…”

Section: Introductionmentioning

confidence: 99%

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Pogrebnjak

Rogoz

Бондар

et al. 2016

Prot Met Phys Chem Surf

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Abstract-This review summarizes the present-day achievements in the study of the structure and properties of protective nanocomposite coatings based on NbN, NbAlN, and NbSiN prepared by a variety of modern deposition techniques. It is shown that a change in deposition parameters has a significant effect on the phase composition of the coatings. Depending on the magnitude of negative potential on the substrate, the pressure of nitrogen or a nitrogen-argon mixture in the chamber, and the substrate temperature, it is possible to obtain coatings containing different phases, such as NbN and SiN x (Si 3 N 4 ), AlN, and NbAl 2 N. It is found that, in the case of formation of the ε-NbN phase, the coatings become very hard; their hardness achieves values on the order of 53 GPa. At the same time, they remain thermally stable at temperatures of up to 600°C, chemically inert, and resistant to wear. The effect of the nanograin size, the volume fraction of boundaries and interfaces, and the point defect concentration on the physicomechanical properties of these coatings is described. Niobium nitride-based coatings can be used in superconducting systems and single-photon detectors; they are capable of operating under the action of strong magnetic fields of up to 20 T; they can be used in integrated logic circuits and applied as protective coatings of machine parts, edges of cutting tools, etc.

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“…TiN, MoN, VN, ZrN, CrN, AlN, NbN). A small quantity of the third element significantly changes the morphology, structure, physical and mechanical properties of the coatings [7][8][9][10]. Quaternary coatings of the above systems, such as Ti-Al-Si-N, Zr-Nb-Ti-Cr-N, Zr-Ti-Cr-N and others are also of great interests [11].…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Research of Superhard (Zr-Ti-Cr-Nb)N Coatings

et al. 2015

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This work presents the results of (Zr-Ti-Cr-Nb)N superhard coatings research. The samples were fabricated by the vacuum-arc deposition method (Arc-PVD). Structure, composition and properties of these coatings were studied. The study of coatings was carried out using scanning electron microscopy, energy dispersive spectroscopy, and X-ray diffraction. Hardness measurements and adhesion tests were performed. The coatings thickness was up to 6.2 µm, nanocrystallites sizes ranged from 4 to 7.3 nm. Values of hardness and cohesive strength were H = 43.7 GPa and LC = 62.06 N, respectively. The optimal conditions for coating deposition were found.

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Formation of composite ternary nitride thin films by magnetron sputtering co-deposition

Cited by 96 publications

References 21 publications

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Structural and mechanical properties of NbN and Nb-Si-N films: Experiment and molecular dynamics simulations

Structure and physicomechanical properties of NbN-based protective nanocomposite coatings: A review

Fabrication and Research of Superhard (Zr-Ti-Cr-Nb)N Coatings

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