In this study, the effect of Al on the high temperature oxidation of Al-containing refractory high entropy alloys (RHEAs) Ta-Mo-Cr-Ti-xAl (x = 5; 10; 15; 20 at%) was examined. Oxidation experiments were performed in air for 24 h at 1200 °C. The oxidation kinetics of the alloy with 5 at% Al is notably affected by the formation of gaseous MoO3 and CrO3, while continuous mass gain was detected for alloys with the higher Al concentrations. The alloys with 15 and 20 at% Al form relatively thin oxide scales and a zone of internal corrosion due to the formation of dense CrTaO4 scales at the interface oxide/substrate. The alloys with 5 and 10 at% Al exhibit, on the contrary, thick and porous oxide scales because of fast growing Ta2O5. The positive influence of Al on the formation of Cr2O3 followed by the growth of CrTaO4 to yield a compact scale is explained by getter and nucleation effects.