Abstract:Formation of a surface having a periodic subwavelength structure (SWS) is a well-known technique for reducing the Fresnel reflection of transmissive optical elements. We fabricated an anti-reflective structured (ARS) surface with a twodimensional periodic structure with the period of 300 nm on an optical glass by a precision molding process using a silica glass mold coated with a thin carbon film. The surface structure was formed on the mold using reactive ion etching (RIE) with fluorocarbon plasma. A thin chr… Show more
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