Formation cross sections, emission cross sections and Fano plots of translational-energy-separated excited hydrogen atoms (n = 3,4) produced in e-H2O collisions

Ogawa, Teiichiro; Ihara, Satoru; Yonekura, Nobuaki; Yasuda, To oru; Nakashima, Kouichi

doi:10.1016/0301-0104(92)80116-d

Cited by 4 publications

(3 citation statements)

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“…Since then, such phenomena were reported with simple hydrocarbons were similar conditions [10]. More recently, the line shapes of the Balmer β lines of H * were observed either in H 2 O [11,12] or in the case of a plasma of methylene chloride mixed with metastable He atoms generated by a low-current hollow cathode discharge in a high-vacuum chamber [13].…”

Section: A Summary Of the Current State Of Knowledge About The Transl...mentioning

confidence: 79%

“…In general, the H atom line shape is the convolution of several Gaussian functions denoting excited atoms with various energy distributions. For example, the line shapes of the excited hydrogen atoms produced from electron-H 2 O collisions have four components [11,12] corresponding to the major processes of the dissociative excitation of H 2 O, whereas there is only one component in the case of CH 4 [10]. At present, the three components observed in the case In papers in which very large Doppler widths of the Balmer Hα emission are reported, indicating the presence of fragments of high translational energy (hot hydrogen atoms), about 20-50 eV, the given explanation considers acceleration of some H + , H + 2 and H + 3 ions in the cathode fall electric field.…”

Section: A Summary Of the Current State Of Knowledge About The Transl...mentioning

confidence: 99%

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The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor

Andrieux

Badie

Ducarroir

et al. 1998

J. Phys. D: Appl. Phys.

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The analysis of the Balmer H and H emission line shapes in a 2 MHz radiofrequency Ar- glow discharge, used in a plasma-assisted CVD reactor, reveals anomalous Doppler profiles which indicate that atomic hydrogen has two kinds of average kinetic energies. These energies vary with the distance z to the grounded substrate and are -0.4 eV for the slow (low-energy) hydrogen and 6-24 eV for the other. Moreover, the Doppler broadenings observed for Ar, and lines lead always to energy values lower than 0.15 eV. From the optical emission signals and a relevant discussion, it is established that would be the origin of the fast hydrogen. Its energy would be limited by charge transfer between and whereas the slow molecular hydrogen would give rise to slow hydrogen by a dissociative excitation mechanism.

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Section: A Summary Of the Current State Of Knowledge About The Transl...mentioning

confidence: 79%

Section: A Summary Of the Current State Of Knowledge About The Transl...mentioning

confidence: 99%

The evolution of the translational energy of hydrogen atoms in a 2 MHz inductively coupled plasma deposition reactor

Andrieux

Badie

Ducarroir

et al. 1998

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…A recent measurement using time-of-flight mass spectroscopy was carried out by Straub et al [73], who reported the cross sections with uncertainties of ±4.5% for total ionization (Graph 75), of ±5.0% for H + production (Graph 81), and of ±11.5% for H Dissociative excitation. The cross sections for formation of excited H(n = 3, 4) atoms (Graphs 82, 83) were given by Ogawa et al [74] for an electron impact energy range of 50-1000 eV. [78] in the electron impact-energy range 20-2000 eV with an estimated uncertainty of ±12%.…”

Section: Water Moleculementioning

confidence: 99%