The formation and stability of He bubbles in Fe irradiated with 2.5 MeV He to a dose of 1.0×1020 ions/m2 were investigated. The results of positron lifetime and coincidence Doppler broadening (CDB) measurements showed that He bubbles were formed in the He‐ion‐irradiated Fe. The growth of the He bubbles by the movement and coalescence of bubbles at temperatures higher than 773 K was detected. The He bubbles remained even at the high temperature of 1373 K. In addition, He atoms were also trapped by dislocation loops formed by the irradiation. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)