Formation a Charge Pump in the Structure of Phototransformators

Study of the effect of local photon annealing on stress in silicon wafers

“…In oxygen containing Cz-Si interstitial oxygen atoms O i form high-mobility oxygen dimers O 2i which associate into clusters of low-temperature thermal donors TD-1 from (SiO n ) + complexes with n < 10 [18]. Simultaneously vacancy clusters form due to the generation of interstitial silicon atoms Si i from thermal donor complexes [10,11,19]. Local spatial formation of clusters with a higher atomic density and the rearrangement of the defect and impurity structure in the excited volume (~6.0% of the surface area) lead to tensile deformation relative to the adjacent non-irradiated area where the initial lattice compression deformation is caused by the smaller atomic radii of impurity boron atoms.…”

“…Many studies have also dealt with the formation of defect oxygen containing regions in wafer bulk for internal gettering [6,7]. Many works [8][9][10][11][12][13][14] have reported experiments for synthesis of hidden n conductivity regions in the bulk of p conductivity wafers using various methods. It has been suggested to use hidden n conductivity regions for the synthesis of charge pumps in base p conductivity regions of photoelectric converters [9][10][11][12][13][14].…”

“…Many works [8][9][10][11][12][13][14] have reported experiments for synthesis of hidden n conductivity regions in the bulk of p conductivity wafers using various methods. It has been suggested to use hidden n conductivity regions for the synthesis of charge pumps in base p conductivity regions of photoelectric converters [9][10][11][12][13][14]. Importantly the formation of thermal donors is sensitive to the presence of structural defects, gettering layers or inhomogeneities that produce stress fields in silicon.…”

“…The aim of this work is to study and compare residual mechanical stresses generated by RTA in silicon wafers with surfaces treated using different methods in two annealing modes: photon annealing (PA) and local photon annealing (LPA). This study will provide for a more efficient use of the process in the synthesis of photoelectric converter structures with charge pumps [10].…”