“…In more general terms, the presented results reveal how one should be cautious when analyzing the XPS spectra solely in terms of the electronegativities of elements and number of oxygen neighbors. Furthermore, the oxidation-induced CLSs of a semiconductor are interpreted, which is further essential to understand phenomena like the ALD mechanisms 4 and the formation of surface defects harmful to electronics and photonics devices 10,16–19 . The HfO 2 /InP interface is a prototypical insulator/semiconductor junction and also a potential component for devices like transistors 10,16–24 , nanowire solar cells 25–27 , and infrared detectors 28,29 .…”