The joint deformation has great influence on machining accuracy for a robotic arm. In this paper, the deformation characteristics of the robotic arm with hybrid kinematic chains is investigated in order to improve its machining accuracy. Firstly, the deformation model of the joints has been established based on the Strain energy method and Castigliano theorem according to the robot structure. Secondly, the deformation influence coefficient (DIC) is defined to investigate the deformation influence of main components on the end-effector, and the deformation characteristics are evaluated by the simulation. Finally, a small size robotic arm prototype is established and robotic drilling comparative experiments are conducted. The theoretical and experiment results show that the machining method can be selected according to the DIC, which the force can be applied to the components with better stiffness. On the other hand, the deformation of driving components can also be reduced when the DIC cannot be adjusted to meet the accuracy requirement.