“…In the future development of biosensors, nanotechnology, including nanomachining techniques [395,396,397,398], will provide bio-microelectromechanical systems (Bio-MEMSs) [399] or nanobiosensing devices (including nanoelectromechanical systems, NEMSs) as new total analytical systems with pumps, valves, reactors, separators, detectors, thermostats, and memories, etc., on chips or arrays. In parallel with such device development, ultrasensitive devices for single-molecule detection will be fabricated on the basis of current studies [30,127,155,168,391,400].…”