Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides

Kang, Jian; Cheng, Zhenzhou; Zhou, Wen; Xiao, Ting‐Hui; Gopalakrisna, Kimmy-Laure; Takenaka, Mitsuru; Tsang, Hon Ki; Goda, Keisuke

doi:10.1364/ol.42.002094

Cited by 81 publications

(48 citation statements)

References 19 publications

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“…The recently demonstrated suspended Ge membrane devices hold the potential to fully utilize the broad transparency band of Ge, although optical functions of these devices at >3-μm wavelength are yet to be realized [29,30]. Infrared-transparent chalcogenides and halides, on the other hand, can be monolithically deposited on Si or dielectric substrates via thermal evaporation or sputtering, with waveguides defined by using two compositions of different indices as core and cladding layers ( Figure 3K-L) [16,[31][32][33][34][35][36][37][38].…”

Section: Waveguides and Passive Devicesmentioning

confidence: 99%

Mid-infrared integrated photonics on silicon: a perspective

et al. 2017

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Abstract:The emergence of silicon photonics over the past two decades has established silicon as a preferred substrate platform for photonic integration. While most silicon-based photonic components have so far been realized in the near-infrared (near-IR) telecommunication bands, the mid-infrared (mid-IR, 2-20-μm wavelength) band presents a significant growth opportunity for integrated photonics. In this review, we offer our perspective on the burgeoning field of mid-IR integrated photonics on silicon. A comprehensive survey on the state-of-the-art of key photonic devices such as waveguides, light sources, modulators, and detectors is presented. Furthermore, on-chip spectroscopic chemical sensing is quantitatively analyzed as an example of mid-IR photonic system integration based on these basic building blocks, and the constituent component choices are discussed and contrasted in the context of system performance and integration technologies.

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Section: Waveguides and Passive Devicesmentioning

confidence: 99%

Mid-infrared integrated photonics on silicon: a perspective

et al. 2017

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“…This makes it a suitable silicon photonics material systems for on-chip spectroscopic systems for gas and liquid sensing, monitoring of air or oil quality, control of engine emissions, free-space communication and light detection and ranging (LiDAR) systems [117], [122], [126]. Apart from GOS, there has been a variety of other Germanium-based mid-infrared technology platforms such as Germanium-on-SOI [127]- [129], Germanium-on-Silicon Nitride [130], Si (1−x) Ge x -on-Silicon [131] and suspended Germanium [132], [133]. Figure 4 gives an overview of the various single-mode waveguide cross-sections possible with the different flavours of silicon photonics platforms discussed above.…”

Section: Germanium Based Silicon Photonicsmentioning

confidence: 99%

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

et al. 2018

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Silicon Photonics is widely acknowledged as a gamechanging technology, driven by the needs of datacom and telecom. Silicon Photonics builds on highly capital-intensive manufacturing infrastructure, and mature open-access silicon photonics platforms are translating the technology from research fabs to industrial manufacturing levels. To meet the current market demands for silicon photonics manufacturing, a variety of openaccess platforms is offered by CMOS pilot lines, R&D institutes and commercial foundries. This paper presents an overview of existing and upcoming commercial and non-commercial openaccess silicon photonics technology platforms. We also discuss the diversity in these open-access platforms and their key differentiators.

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“…This technologically profound concept was demonstrated for the first time in Refs. [43][44][45] , and most recently, extensively utilized in a variety of photonic devices 46 , including components for wideband [47][48][49] and narrowband [50][51][52] spectral operation, sensing structures [53][54][55] , or waveguides for extended mid-infrared (mid-IR) wavelengths 56,57 , to name a few outstanding implementations.…”

Section: Device Designmentioning

confidence: 99%

Low loss grating coupled optical interfaces for large volume fabrication with deep ultraviolet optical lithography

Benedikovič

Alonso‐Ramos

Guerber

et al. 2018

Silicon Photonics: From Fundamental Research to Manufacturing

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Optical input/output interfaces between silicon-on-insulator (SOI) waveguides and optical fibers, allowing robust, costeffective and low-loss coupling of light, are fundamental functional elements in the library of silicon photonic devices. Surface grating couplers are particularly desirable as they allow wafer-scale device testing, yield improved alignment tolerances, and are compatible with state-of-the-art integration and packaging technologies. While several factors jointly contribute to the coupler performance, the grating directionality is a critical parameter for high-efficiency fiber-chip coupling. To address this issue, conventional coupler designs typically call upon comparatively complex architectures to improve light coupling efficiency. Increasing the intrinsic directionality of the grating by exploiting the blazing effects is another promising solution. In this paper, we report on our recent advances in development of low-loss grating couplers that afford excellent directionality, close to the theoretical limit of 100%. In particular, we demonstrate, by theory and experiments, several implementations of blazed grating couplers with layout features that are compatible with deepultraviolet (deep-UV) optical lithography. Devices can be advantageously implemented on various photonic platforms, including industry-specific and the offerings of publicly accessible foundries. The first experimental realizations of uniform deep-UV-compatible couplers yield losses of-2.7 dB at 1.55-µm and a 3-dB bandwidth of 62 nm. A subwavelength-index-engineered impedance matching transition is used to reduce back-reflections down to-20 dB.

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Focusing subwavelength grating coupler for mid-infrared suspended membrane germanium waveguides

Cited by 81 publications

References 19 publications

Mid-infrared integrated photonics on silicon: a perspective

Mid-infrared integrated photonics on silicon: a perspective

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

Low loss grating coupled optical interfaces for large volume fabrication with deep ultraviolet optical lithography

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