Focusing of a tabletop soft-x-ray laser beam and laser ablation

Benware, B.; Ozols, Andris; Rocca, J. J.; Artioukov, Igor A.; Кондратенко, В. В.; Виноградов, А. В.

doi:10.1364/ol.24.001714

Cited by 67 publications

(27 citation statements)

References 9 publications

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“…The average intensity within a 2 ~tm diameter region is estimated to be greater than 1 x 10 11 W /cm 2 from the computed fraction of rays that intersect this region. The analysis also confirms that the minimum spot size obtained in this experiment is dominant 1y limited by the spherical aberration [ 19] .…”

Section: Plasma Generation With a Fsupporting

confidence: 83%

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Applications of high repetition rate tabletop soft X-ray lasers become a reality in several fields

et al. 2001

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.\b!.tract. For many years researchers have envisioned the development of compact high repetition rate tabletop soft x-ray la;er, that could be routmcly used in application in numerous disciplines. With demonstrated average powers of several mW and milliJouk-ln cl pulse encq;y at 46.9nm, the Ne-likc Ar capillary discharge-pumped laser is the first compact laser to reach thrs goal. ln tillS paper we summan~e the development status of high repetition rate tabletop soft x-ray lasers based on capillary drscharge excrtation, and grvc examples of their successful use in several applications. Results of the use of a caprllary discharge pumped 46.9nm laser m dense plasma interferometry, soft x-ray reflcctometry for the determmation of optical constants. characterization of diffraction gratings, laser ablation of materials, and plasma generation are described. The ohscT,·atron of laSing at _'i2.9runline rn Ne-like C'l with output pulse energy up to 10 ).lJ is also reported.

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Section: Plasma Generation With a Fsupporting

confidence: 83%

“…These results are discussed in more detail in these proceedings in the paper hy Vinogradov ct a!. [ 18], and in a recent paper by Benware et al [ 19]. Po1ari£ed and unpolarized laser beams p diffraction grating.…”

Section: Generation Of a Polarized Soft X-ray Beam And Application Tomentioning

confidence: 93%

Applications of high repetition rate tabletop soft X-ray lasers become a reality in several fields

et al. 2001

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“…Here, we summarize the characterization of a focused 46.9 nm laser beam generated by a Ne-like Ar capillary discharge soft X-ray laser, and the results of the first laser ablation experiment with a soft X-ray laser [16].…”

Section: Soft X-ray Laser Ablationmentioning

confidence: 99%

Extremely compact soft X-ray lasers based on capillary discharges

Rocca

Filevich

Hammarsten

et al. 2003

Free Electron Lasers 2002

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Extremely compact high repetition rate soft X-ray lasers based on capillary discharge excitation have demonstrated average powers of a few milliWatt at 46.9 nm, milli-Joule-level pulse energy, peak spectral brightness several orders of magnitude larger than third-generation synchrotron beam lines, and excellent spatial coherence. Examples of the use of a capillary discharge soft X-ray laser in dense plasma diagnostics and laser ablation of materials are summarized. r

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“…The horizontal ridges observed in the ablated spots are the result of the shadow produced by the sample holder, which blocks part of the laser beam. 17 The PTFE and PI samples were irradiated in the same way as APPLIED PHYSICS LETTERS 86, 034109 ͑2005͒ …”

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“…A motorized positioning system was used to translate the samples along the beam optical axis, as well as in the directions perpendicular to the beam. 17 The former motion allowed us to vary the irradiation fluence by controlling the laser spot diameter on the sample surface, while the pulse energy and duration were kept constant. Figure 1 shows an optical micrograph of a PMMA sample exposed to three different fluences, with increasing value in the arrow direction.…”

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Ablation of organic polymers by 46.9-nm-laser radiation

Juha

Bittner

Chvostová

et al. 2005

Applied Physics Letters

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We report results of the exposure of poly͑tetrafluoroethylene͒ -͑PTFE͒, poly͑methyl methacrylate͒ -͑PMMA͒, and polyimide -͑PI͒ to intense 46.9-nm-laser pulses of 1.2-ns-duration at fluences ranging from ϳ0.1 to ϳ10 J/cm 2 . The ablation rates were found to be similar for all three materials, ϳ80-90 nm/ pulse at 1 J / cm 2 . The results suggest that the ablation of organic polymers induced by intense extreme ultraviolet laser radiation differs from that corresponding to irradiation with longer wavelengths. © 2005 American Institute of Physics. ͓DOI: 10.1063/1.1854741͔ Ablation of organic polymers by optical radiation, in particular from excimer lasers, has been extensively studied. 1-3 However, polymer ablation induced by extreme ultraviolet ͑XUV͒ radiation with wavelength shorter than 100 nm is discussed in only a small number of publications. Poly ͑butene-1 sulphone͒, 4 PMMA, 5,6 poly ͑ethylene terephthalate͒, 7 and PTFE 5,8 were ablated by incoherent, nonmonochromatic XUV emission from laser-produced plasma. A Z-pinch plasma was used as an XUV source for ablation of PMMA 5 and PTFE. 5,9 Very recently PMMA was efficiently ablated by sub-100-fs pulses of 86-nm-radiation provided by a free-electron laser. 7,10 A large number of studies on direct photoetching of the organic polymers induced by XUV synchrotron radiation were also reported. 11-13 However, according to Haglund's criterion 14 this photoinduced material removal is closer to laser desorption than to laser ablation because of a low peak power of the photon beams delivered by a synchrotron radiation source.The recent advances in compact high repetition rate XUV lasers 15 producing nanosecond pulses of monochromatic radiation with energy of several hundred micro-Joules opens the possibility to study materials ablation in a new regime. In this letter, we report on the ablation behavior of three common organic polymers: PTFE, PMMA, and PI, irradiated with an intense focused 46.9-nm-laser beam. The ablation processes induced by nanosecond pulses of 46.9-nm-laser radiation are compared with those occurring in the polymer materials irradiated with conventional longer wavelength laser sources.The samples studied here were 1-mm-thick sheets ͑Goodfellow͒ cut into 2.0ϫ 5.0 mm 2 chips. The PTFE and PI samples were polished, while the PMMA was used directly with no additional treatment. The samples were placed into vacuum chamber where they were exposed to 1.2 ns FWHM pulses of 46.9 nm radiation from a capillary discharge Nelike Ar laser. 15 Laser pulses with energy of ϳ130 J were focused onto the sample surfaces by a spherical Sc/ Si multilayer-coated mirror 16 with measured reflectivity of ϳ30%. A motorized positioning system was used to translate the samples along the beam optical axis, as well as in the directions perpendicular to the beam. 17 The former motion allowed us to vary the irradiation fluence by controlling the laser spot diameter on the sample surface, while the pulse energy and duration were kept constant. Figure 1 shows an optical micrograph of a PM...

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Focusing of a tabletop soft-x-ray laser beam and laser ablation

Cited by 67 publications

References 9 publications

Applications of high repetition rate tabletop soft X-ray lasers become a reality in several fields

Applications of high repetition rate tabletop soft X-ray lasers become a reality in several fields

Extremely compact soft X-ray lasers based on capillary discharges

Ablation of organic polymers by 46.9-nm-laser radiation

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