2001
DOI: 10.2138/am-2001-8-917
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Focused ion beam milling: A method of site-specific sample extraction for microanalysis of Earth and planetary materials

Abstract: Argon ion milling is the conventional means by which mineral sections are thinned to electron transparency for transmission electron microscope (TEM) analysis, but this technique exhibits significant shortcomings. In particular, selective thinning and imaging of submicrometer inclusions during sample milling are highly problematic. We have achieved successful results using the focused ion beam (FIB) lift-out technique, which utilizes a 30 kV Ga + ion beam to extract electron transparent specimens with nanomete… Show more

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Cited by 182 publications
(124 citation statements)
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“…Final thinning down to a thickness of less than 100 nm was achieved using low incident angles and low Ga ion currents (approximately 50 pA). A further description of the FIB sample preparation technique can be found in Heaney et al (33).…”
Section: Methodsmentioning
confidence: 99%
“…Final thinning down to a thickness of less than 100 nm was achieved using low incident angles and low Ga ion currents (approximately 50 pA). A further description of the FIB sample preparation technique can be found in Heaney et al (33).…”
Section: Methodsmentioning
confidence: 99%
“…Following the ion probe measurements, we extracted ultra-thin sections for transmission electron microscopy (TEM) studies of the graphite grains, from both the metal-poor lithology and the metal-rich sheet using focused ion beam (FIB) lift-out techniques (Stroud et al, 2000;Heaney et al, 2001). The TEM studies were performed with a Philips CM30 equipped with an Oxford Link EDS system.…”
Section: Graphite Morphology and Isotopic Compositionmentioning
confidence: 99%
“…TEM requires the preparation of electron transparent specimens and for geological materials this is typically achieved by grinding minerals to a powder, ion milling or ultra-microtome sectioning (Heaney et al, 2001;Lee, 2010).…”
Section: Introductionmentioning
confidence: 99%