Focused electron beam induced deposition

Pablo-Navarro, Javier; Sangiao, Soraya; Magén, Cesar; Teresa, José María de

doi:10.1088/978-0-7503-2608-7ch4

Cited by 7 publications

(14 citation statements)

References 44 publications

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“…Focused electron beam-induced deposition (FEBID) is an additive, direct-write technique based on the local decomposition of precursor molecules by a focused electron beam [ 324 , 325 , 326 ]. A gas injection system continuously delivers gaseous precursor molecules into the vacuum chamber, where they adsorb, diffuse and eventually desorb again from the surface.…”

Section: Development Of Ultra-sharp Mfm Tipsmentioning

confidence: 99%

A Review of the Current State of Magnetic Force Microscopy to Unravel the Magnetic Properties of Nanomaterials Applied in Biological Systems and Future Directions for Quantum Technologies

Winkler,

Ciria,

Ahmad

et al. 2023

Nanomaterials

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Magnetism plays a pivotal role in many biological systems. However, the intensity of the magnetic forces exerted between magnetic bodies is usually low, which demands the development of ultra-sensitivity tools for proper sensing. In this framework, magnetic force microscopy (MFM) offers excellent lateral resolution and the possibility of conducting single-molecule studies like other single-probe microscopy (SPM) techniques. This comprehensive review attempts to describe the paramount importance of magnetic forces for biological applications by highlighting MFM’s main advantages but also intrinsic limitations. While the working principles are described in depth, the article also focuses on novel micro- and nanofabrication procedures for MFM tips, which enhance the magnetic response signal of tested biomaterials compared to commercial nanoprobes. This work also depicts some relevant examples where MFM can quantitatively assess the magnetic performance of nanomaterials involved in biological systems, including magnetotactic bacteria, cryptochrome flavoproteins, and magnetic nanoparticles that can interact with animal tissues. Additionally, the most promising perspectives in this field are highlighted to make the reader aware of upcoming challenges when aiming toward quantum technologies.

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Section: Development Of Ultra-sharp Mfm Tipsmentioning

confidence: 99%

A Review of the Current State of Magnetic Force Microscopy to Unravel the Magnetic Properties of Nanomaterials Applied in Biological Systems and Future Directions for Quantum Technologies

Winkler,

Ciria,

Ahmad

et al. 2023

Nanomaterials

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“…Focused ion/electron beam induced deposition (FIBID/ FEBID) is a handy tool for nanofabrication, nanopatterning and engineering of the devices at the nanoscale [1][2][3][4][5]. It is successfully utilized to fabricate nanodevices and patterns with different functionalities such as SQUID devices [6,7], superconducting proximity devices [8,9], 3D structures with vertical alignment [10,11] etc.…”

Section: Introductionmentioning

confidence: 99%

“…It is successfully utilized to fabricate nanodevices and patterns with different functionalities such as SQUID devices [6,7], superconducting proximity devices [8,9], 3D structures with vertical alignment [10,11] etc. Compared to other nanofabrication techniques such as electron beam lithography (EBL) and optical lithography techniques, FIBID/FEBID offers advantages as being a single step process devoid of use of masks/resist for the growth of nanodevices [1][2][3][4][5]12]. The typical resolution offered by gallium ions (Ga + ) ions in FIB is in the range of ∼30 nm [4], while for electrons and helium ions (He + ) it is in the range of ∼10 nm and less [5].…”

Section: Introductionmentioning

confidence: 99%

“…Compared to other nanofabrication techniques such as electron beam lithography (EBL) and optical lithography techniques, FIBID/FEBID offers advantages as being a single step process devoid of use of masks/resist for the growth of nanodevices [1][2][3][4][5]12]. The typical resolution offered by gallium ions (Ga + ) ions in FIB is in the range of ∼30 nm [4], while for electrons and helium ions (He + ) it is in the range of ∼10 nm and less [5]. The FIBID deposited tungsten (W)-structures (an alloy consisting of W, C and Ga) are reported to be superconducting [13] with a superconducting transition temperature (T C ) of ∼5 K. Since, the appearance of the first report of FIB deposited W by Sadaki et al [13], series of reports [14][15][16][17][18][19][20] appeared in different journals which touched upon different functionalities of W-based nanostructures (nanowires/films) with slightly different compositions and shapes (meander forms, 3D printed structurers etc).…”

Section: Introductionmentioning

confidence: 99%

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Current–voltage characteristics of focused ion beam fabricated superconducting tungsten meanders

Kumar,

Husale,

Saravanan

et al. 2023

Nanotechnology

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We report on the superconducting properties and intermediate resistive steps (IRS) observed in the current-voltage characteristics (IVC) of tungsten meander (MW) structures fabricated using focused ion beam (FIB) technique. Three numbers of MWs were studied with individual wire widths of 240 nm, 640 nm and 850 nm with superconducting transition temperatures (TC) of 4.5 K, 4.55 K and 4.60 K respectively. The measured normal state resistance values at 8 K for these wires are of ~182 kΩ, ~49 kΩ and ~32 kΩ, respectively as a function of increasing wire widths; are higher than the quantum of resistance (h/4e2 = 6.45 kΩ) indicating extreme disorder nature of the fabricated samples. The variation of resistance with respect to temperature (for T < TC) follows the theoretical frame work related to weak-link induced thermally activated phase slip (WL-TAPS) for the MW wire of width ~240 nm, while for other samples the convergence between WL-TAPS and the experimental data are not satisfactory. Though the IRS features are present in all the samples with varying degree of prominence, an external magnetic field causes its evolution demarcating different boundary lines with respect to temperature for all the samples. Finally, we believe that the occurrence of IRS is due to phase slip mechanism which further proliferates through PSCs or PSLs in IVC either with respect to temperature or magnetic field. We also believe that the formation of PSCs or PSLs are due to interaction of vortex-anti vortex pairs present along the channel width due to the disorder in the samples. As per our knowledge, such IRS features are not being reported for W-meander wires fabricated using FIB technique. The observation IRS features is promising for the use of FIB fabricated W nanowires for various quantum applications including single photon detection.

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“…This results in metal-enriched permanent 2D or 3D nanostructures [8], whilst volatile fragments are pumped away. FEBIP general set up and operating principles have been comprehensively described in literature [9,10] together with the promising applications of these deposits in the fields of nanoelectronics [11], nanomagnetics [12,13], photonics [7], plasmonics [14,15], superconductors [16,17], (bio)sensors [18][19][20], etc. However, one of the main challenges associated to this methodology is that precursor materials do not fully dissociate under the electron beam.…”

Section: Introductionmentioning

confidence: 99%

Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps

et al. 2022

Self Cite

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The ability to create metallic patterned nanostructures with excellent control of size, shape and spatial orientation is of utmost importance in the construction of next-generation electronic and optical devices as well as in other applications such as (bio)sensors, reactive surfaces for catalysis, etc. Moreover, development of simple, rapid and low-cost fabrication processes of metallic patterned nanostructures is a challenging issue for the incorporation of such devices in real market applications. In this contribution, a direct-write method that results in highly conducting palladium-based nanopatterned structures without the need of applying subsequent curing processes is presented. Spin-coated films of palladium acetate were irradiated with an electron beam to produce palladium nanodeposits (PdNDs) with controlled size, shape and height. The use of different electron doses was investigated and its influence on the PdNDs features determined, namely: (1) thickness of the deposits, (2) atomic percentage of palladium content, (3) oxidation state of palladium in the deposit, (4) morphology of the sample and grain size of the Pd nanocrystals and (5) resistivity. It has been probed that the use of high electron doses, 30000 μC·cm-2 results in the lowest resistivity reported to date for PdNDs, namely 145.1 μΩ·cm, which is only one order of magnitude higher than metallic palladium. This result paves the way for development of simplified lithography processes of nanostructured deposits avoiding subsequent post-treatment steps.

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Focused electron beam induced deposition

Cited by 7 publications

References 44 publications

A Review of the Current State of Magnetic Force Microscopy to Unravel the Magnetic Properties of Nanomaterials Applied in Biological Systems and Future Directions for Quantum Technologies

A Review of the Current State of Magnetic Force Microscopy to Unravel the Magnetic Properties of Nanomaterials Applied in Biological Systems and Future Directions for Quantum Technologies

Current–voltage characteristics of focused ion beam fabricated superconducting tungsten meanders

Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps

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