<b><i>Background:</i></b> Extracorporeal carbon dioxide removal (ECCO<sub>2</sub>R) was used to prevent invasive mechanical ventilation and associated mechanical damage in patients with acute respiratory distress syndrome (ARDS). <b><i>Objectives:</i></b> This study aimed to investigate the efficacy and safety of ECCO<sub>2</sub>R treatment in patients with ARDS or chronic obstructive pulmonary disease (COPD). <b><i>Methods:</i></b> MEDLINE, EMBASE, and the Cochrane Library were systematically searched for relevant studies that reported patient prognosis, blood gas parameters, and ECCO<sub>2</sub>R-related adverse events (AEs) published as of September 2020. Odds ratios (ORs), weighted mean differences (WMDs), and their corresponding 95% confidence intervals (CIs) were used to compare the outcomes. <b><i>Results:</i></b> Fifteen studies involving 532 ARDS or COPD patients were included. Compared with controls, ECCO<sub>2</sub>R did not influence the 28-day mortality (OR = 0.73, 95% CI: 0.28–1.87, <i>p</i> = 0.51), the length of hospital stay (WMD = 3.34, 95% CI: −5.22 to 11.90, <i>p</i> = 0.444), and the length of intensive care unit stay (WMD = −0.39, 95% CI: −8.76 to 7.99, <i>p</i> = 0.928). Compared with baseline values, partial pressure of carbon dioxide (PaCO<sub>2</sub>) in the ECCO<sub>2</sub>R group was significantly reduced, while the ratio of arterial oxygen partial pressure to fractional inspired oxygen (PaO<sub>2</sub>/FiO<sub>2</sub>) and pH increased. The overall rate of ECCO<sub>2</sub>R-related AEs was 35% (95% CI: 17–53%, <i>p</i> < 0.001), and bleeding was the most common AE with a rate of 22% (95% CI: 13–31%, <i>p</i> = 0.002). The rate of ECCO<sub>2</sub>R-related deaths was low. <b><i>Conclusions:</i></b> In conclusion, there was no statistically significant difference in the prognosis of patients with and without ECCO<sub>2</sub>R treatment. ECCO<sub>2</sub>R significantly reduced PaCO<sub>2</sub> and improved PaO<sub>2</sub>/FiO<sub>2</sub> and pH values in patients with ARDS or COPD. Bleeding was the most common ECCO<sub>2</sub>R-related AE.