The electron-induced surface chemistry of perfluoropolyalkylether (PFPE) lubricants on a-CH x films has been probed by studying the impact of free electrons on perfluorodiethylether, (CF 3 CF 2 ) 2 O, and 2,2,2-trifluoroethanol, CF 3 CH 2 OH, as models of the chemical functionality of PFPE lubricants such as Fomblin Zdol. Electron-stimulated decomposition of (CF 3 CF 2 ) 2 O and CF 3 CH 2 OH on fresh and oxidized a-CH x is observed when the sample is unbiased and in the presence of 70 eV free electrons. Electron-induced decomposition is indicated by the deposition of fluorine onto the surface of the a-CH x film following desorption of molecular (CF 3 CF 2 ) 2 O and CF 3 CH 2 OH by heating in front of a mass spectrometer. Biasing the sample to )80 V successfully eliminates the decomposition by preventing the impingement of electrons onto the surface. The electron-stimulated decomposition of PFPE lubricants may contribute to lubricant decomposition during normal drive operation.