Abstract:This paper presents two new concepts that together provide a 100,000X improvement in stability for AAs that produce highly-fluorinated, strong sulfonic acids. These two new design concepts are based on (1) an olefin-trigger structure and (2) a trifluoromethyl groupalpha to the sulfonic ester. These approaches led to the synthesis of the first stable acid amplifier that generates triflic acid and for the synthesis of AAs that are stable enough to be used as monomers in free-radical polymerization reactions yet… Show more
Polymers bearing acid-amplifying units were designed to suppress the excess diffusion of acid species, evaluated for their photosensitivity with photoacid generators, and applied for positive-working ESCAP resists.
Polymers bearing acid-amplifying units were designed to suppress the excess diffusion of acid species, evaluated for their photosensitivity with photoacid generators, and applied for positive-working ESCAP resists.
Inspired by the self-adaptive nature of living organisms, the development of stimuli-responsive polymers that can sense and respond to surrounding microenvironments has received increasing interest. To date, stimuli-responsive polymers have...
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