2021
DOI: 10.1016/j.chemosphere.2021.131287
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Fluorine-implanted indium-gallium-zinc oxide (IGZO) chemiresistor sensor for high-response NO2 detection

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Cited by 15 publications
(5 citation statements)
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“…With the increase of fossil combustion, industrial waste gas, and vehicle exhaust emissions, nitrogen dioxide (NO 2 ) has emerged as a source of pollution, and the development of excellent NO 2 sensors plays a key role in monitoring its leakage. 1,2 At present, the methods commonly used to detect NO 2 include gas chromatography, liquid chromatography, electrochemical sensing, optical acoustic sensors, etc. However, the above sensors have some problems such as a large volume, slow response, high power consumption, and expensive equipment.…”
Section: Introductionmentioning
confidence: 99%
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“…With the increase of fossil combustion, industrial waste gas, and vehicle exhaust emissions, nitrogen dioxide (NO 2 ) has emerged as a source of pollution, and the development of excellent NO 2 sensors plays a key role in monitoring its leakage. 1,2 At present, the methods commonly used to detect NO 2 include gas chromatography, liquid chromatography, electrochemical sensing, optical acoustic sensors, etc. However, the above sensors have some problems such as a large volume, slow response, high power consumption, and expensive equipment.…”
Section: Introductionmentioning
confidence: 99%
“…With the increase of fossil combustion, industrial waste gas, and vehicle exhaust emissions, nitrogen dioxide (NO 2 ) has emerged as a source of pollution, and the development of excellent NO 2 sensors plays a key role in monitoring its leakage. , At present, the methods commonly used to detect NO 2 include gas chromatography, liquid chromatography, electrochemical sensing, optical acoustic sensors, etc. However, the above sensors have some problems such as a large volume, slow response, high power consumption, and expensive equipment. , Metal oxide sensors have attracted the attention of researchers because of their advantages such as small size, low power consumption, and low price. Compared with n-type semiconductor sensors such as zinc oxide (ZnO), tin oxide (SnO 2 ), tungsten trioxide (WO 3 ), etc., p-type semiconductors are less susceptible to high temperatures and humidity, having better surface reaction and catalytic properties. , p-type semiconductors are expected to be excellent gas sensing materials for detecting NO 2 leakage.…”
Section: Introductionmentioning
confidence: 99%
“…1,2 Thus, the medical sciences, industrial control, and environmental monitoring sectors have all paid close attention to developing room temperature NO 2 sensor technologies. 3,4 Conventional NO 2 sensors face several challenges, notably insufficient sensitivity and stability at ambient temperature. 5 Specifically, most of the gas sensor materials currently used are metal oxide semiconductors, which are prone to degradation or oxidation in high temperature and high humidity environments, affecting their long-term stability; in addition, the interlayer interactions of metal oxide semiconductors are usually strong, resulting in a fixed interlayer spacing, thus affecting their sensing performance, and their low specific surface area also limits their active surface area during gas adsorption; finally, their surface chemical properties are relatively stable, making it difficult to further functionalize and modify their surfaces, thereby increasing the difficulty of improving their sensing performance.…”
Section: Introductionmentioning
confidence: 99%
“…Ion doping is a promising approach in gas-sensing performance improvement. On the one hand, doping ions with different quantities of charges can effectively adjust the carrier concentration and energy band structure of semiconductors [23,24]. On the other hand, due to the difference in diameters between doping ions and original ions, ion doping can create lots of lattice imperfections.…”
Section: Introductionmentioning
confidence: 99%